Low-inertia multi-axis multi-directional mechanically scanned ion implantation system

A workpiece scanning system for scanning a workpiece through an ion beam, the workpiece scanning system comprising:

• a process chamber associated with the ion beam;
• a plurality of motors operably coupled to the process chamber, wherein each of the plurality of motors has a rotational shaft associated therewith, wherein at least a portion of each rotational shaft generally resides within the process chamber;
• a linkage assembly associated with each of the plurality of motors, wherein each linkage assembly respectively comprises a crank arm fixedly coupled to the at least a portion of the rotational shaft and a strut pivotally coupled to the crank arm;
• an end effector operably coupled to the strut of each linkage assembly;
• a plurality of electrostatic chucks, wherein each of the plurality of electrostatic chucks is operable to support the workpiece thereon;
• an electrostatic chuck base station, wherein the end effector comprises a central structure configured to selectively engage and disengage each of the plurality of electrostatic chucks from the electrostatic chuck base station, and
• a controller operable to control the position of the workpiece with respect to the ion beam via a control of the plurality of motors.

A method for implanting ions into a workpiece, the method comprising:

• providing an ion beam;
• providing a workpiece scanning system comprising a plurality of motors operatively coupled to an end station, wherein each of the plurality of motors has a rotational shaft associated therewith, wherein at least a portion of each rotational shaft generally resides within the end station, and wherein each of the plurality of motors has a linkage assembly respectively associated therewith, wherein each linkage assembly respectively comprises a crank arm and a strut, wherein the crank arm of each linkage assembly is fixedly coupled to the respective rotational shaft, and wherein the strut of each linkage assembly is pivotally coupled to the respective crank arm at a first joint, and wherein each strut is further pivotally coupled to an end effector at a second joint;
• providing a plurality of electrostatic chucks, wherein each of the plurality of electrostatic chucks are operable to selectively grip the workpiece, and wherein the end effector comprises a central structure associated with the plurality of electrostatic chucks;
• selectively engaging one of the plurality electrostatic chucks via the central structure;
• selectively engaging the workpiece via the one of the plurality of electrostatic chucks;
• gripping the workpiece via the end effector;
• and
• controlling a spatial position and orientation of the end effector and workpiece with respect to the ion beam via a control of the plurality of motors, wherein the workpiece is scanned through the ion beam along a predetermined scan path.