Positioning system

A method for moving a sample within a vacuum chamber, the method comprises:

• providing a positioning system comprising a linear motor having a coil stator with a plurality of coil stator segments, a movable magnetic unit, a mechanical support element mechanically coupled to the movable magnetic unit, a power supply element operably coupled to the coil stator segments, a sensor configured to provide position feedback indicating alignment between the movable magnetic unit and the coil stator segments, and a controller operably coupled to the sensor and the power supply;
• sensing, with the sensor, a position of the movable magnetic unit relative to the coil stator segments and providing position feedback to the controller;
• controlling, by the controller in response to said position feedback, the power supply element to selectively supply power only to dynamically energize only those coil stator segments that are contemporaneously aligned with the movable magnetic unit, and to prevent the power supply from supplying power to coil stator segments not contemporaneously aligned with the movable magnetic unit, thereby moving the movable magnetic unit by energizing said selected coil segments while minimizing heat generation in the coil stator segments not contemporaneously aligned with the movable magnetic unit, wherein the moving of the movable magnetic unit results in moving a mechanical support element that is located within the vacuum chamber and supports the sample;
• and
• reducing a temperature of the coil stator by a heat reduction element.

A positioning system, comprising:

• a first linear motor that comprises a first movable magnetic unit and a first coil stator comprising a plurality of first coil stator segments;
• a mechanical support element coupled to move with the first movable magnetic unit and configured to support a sample within a vacuum chamber;
• a power supply element configured to independently supply power to different coil stator segments of the first plurality of coil stator segments to induce a movement of the first movable magnetic unit in relation to the first coil stator along an axis;
• a first heat reduction element comprising a first continuous thermal conduit physically and thermally coupled to the first coil stator;
• a sensor coupled to move with the mechanical support and configured to provide position feedback indicating alignment between the movable magnetic unit and the plurality of first coil stator segments;
• and
• a controller configured to receive the position feedback from the sensor and, in response, control the power supply element to selectively supply power to dynamically energize only those coil stator segments of the plurality of first coil stator segments that are contemporaneously physically aligned with the first movable magnetic unit and prevent the power supply element from supplying power to coil stator segments of the plurality of first coil stator segments that are not contemporaneously physically aligned with the first movable magnetic unit thereby minimizing heat generation in the coil stator segments of the first coil stator not contemporaneously physically aligned with the first movable magnetic unit during operation.