B81C 1/00
Manufacture or treatment of devices or systems in or on a substrate
Official title: Manufacture or treatment of devices or systems in or on a substrate (B81C3/00 takes precedence)
B81C1/00 (Manufacture or treatment of devices or systems in or on a substrate) appears on 8,900 US grants and 10,371 published applications in this corpus.
Search patents in B81C- Granted patents
- 8,900
- Published applications
- 10,371
- Assignees
- 2,172
- Inventors
- 14,079
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 0 | 0 |
| 1986 | 4 | 0 |
| 1987 | 3 | 0 |
| 1988 | 2 | 0 |
| 1989 | 3 | 0 |
| 1990 | 4 | 0 |
| 1991 | 5 | 0 |
| 1992 | 5 | 0 |
| 1993 | 7 | 0 |
| 1994 | 17 | 0 |
| 1995 | 22 | 0 |
| 1996 | 33 | 0 |
| 1997 | 41 | 0 |
| 1998 | 58 | 0 |
| 1999 | 53 | 0 |
| 2000 | 82 | 0 |
| 2001 | 85 | 54 |
| 2002 | 129 | 188 |
| 2003 | 157 | 240 |
| 2004 | 215 | 350 |
| 2005 | 225 | 362 |
| 2006 | 215 | 362 |
| 2007 | 231 | 417 |
| 2008 | 242 | 405 |
| 2009 | 234 | 419 |
| 2010 | 342 | 443 |
| 2011 | 317 | 415 |
| 2012 | 337 | 450 |
| 2013 | 397 | 490 |
| 2014 | 513 | 586 |
| 2015 | 549 | 642 |
| 2016 | 567 | 594 |
| 2017 | 569 | 582 |
| 2018 | 481 | 536 |
| 2019 | 509 | 476 |
| 2020 | 498 | 489 |
| 2021 | 391 | 428 |
| 2022 | 327 | 351 |
| 2023 | 307 | 310 |
| 2024 | 285 | 288 |
| 2025 | 262 | 281 |
| 2026 | 171 | 213 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81C 1/00015Manufacture or treatment of devices or systems in or on a substrate6,555
- B81C 1/00436Shaping materials, i.e. techniques for structuring the substrate or the layers on1,498
- B81C 1/00349Creating layers of material on a substrate551
- B81C 1/00642Manufacture or treatment of devices or systems in or on a substrate525
- B81C 1/00912Treatments or methods for avoiding stiction of flexible or moving parts of335
- B81C 1/00777Preserve existing structures from alteration316
- B81C 1/00865Multistep processes for the separation of wafers into individual elements314
- B81C 1/00388Etch mask forming233
Recent patents
- Femtosecond laser surface processing for controlled fill and targeted deposition6 Oct 2026US 12,752,371 B1Honeywell Federal Manufacturing & Technologies, LLC
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods6 Oct 2026US 12,753,068 B2Lawrence Semiconductor Research Laboratory, Inc.
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Multiple plated via arrays of different wire heights on a same substrate6 Oct 2026US RE51,062 E1Adeia Semiconductor Technologies LLC
- Microelectromechanical systems (mems) actuator with magnetic latching and methods for manufacturing and using the same8 Oct 2026US 2026/0307980 A1Atomic Machines, Inc.
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Packaging method for mems acoustic device structure, mems acoustic device packaging structure and mems chip packaging method for acoustic device8 Oct 2026US 2026/0307982 A1Hefei Smat Technology Co., Ltd.
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Anchor structure1 Oct 2026US 2026/0296876 A1Lawrence Semiconductor Research Laboratory, Inc.
Most cited
By later US patents
- Formation of microstamped patterns on surfaces and derivative articles1,049US 5,512,131 APresident and Fellows of Harvard College · 1996
- Microneedle devices and methods of manufacture and use thereof907US 6,334,856 B12002
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004
- Microfluidic structure and process for its manufacture704US 5,376,252 APharmacia Biosensor AB · 1994
- Method of anisotropically etching silicon679US 5,501,893 ARobert Bosch GmbH · 1996