B81C 1/00642
Manufacture or treatment of devices or systems in or on a substrate
Official title: {for improving the physical properties of a device}
B81C1/00642 (Manufacture or treatment of devices or systems in or on a substrate) appears on 525 US grants and 601 published applications in this corpus.
Search patents in B81C- Granted patents
- 525
- Published applications
- 601
- Assignees
- 302
- Inventors
- 1,257
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 3 | 0 |
| 1996 | 1 | 0 |
| 1997 | 3 | 0 |
| 1998 | 3 | 0 |
| 1999 | 6 | 0 |
| 2000 | 0 | 0 |
| 2001 | 13 | 3 |
| 2002 | 8 | 8 |
| 2003 | 9 | 13 |
| 2004 | 14 | 13 |
| 2005 | 7 | 11 |
| 2006 | 8 | 20 |
| 2007 | 8 | 18 |
| 2008 | 13 | 11 |
| 2009 | 14 | 14 |
| 2010 | 18 | 20 |
| 2011 | 11 | 20 |
| 2012 | 7 | 17 |
| 2013 | 18 | 23 |
| 2014 | 19 | 19 |
| 2015 | 30 | 38 |
| 2016 | 37 | 45 |
| 2017 | 37 | 38 |
| 2018 | 35 | 50 |
| 2019 | 35 | 27 |
| 2020 | 41 | 26 |
| 2021 | 22 | 26 |
| 2022 | 18 | 18 |
| 2023 | 28 | 27 |
| 2024 | 24 | 33 |
| 2025 | 17 | 33 |
| 2026 | 15 | 30 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Micro-electro-mechanical system and manufacturing method thereof29 Sep 2026US 12,747,154 B2Beijing BOE Technology Development Co., Ltd.
- Microscale flexible strain sensor8 Sep 2026US 12,729,106 B2Carnegie Mellon University
- Decoupling method for semiconductor device23 Jun 2026US 12,662,371 B2STMicroelectronics International N. V.
- Method for manufacturing mirror device23 Jun 2026US 12,662,373 B2Hamamatsu Photonics K.K.
- Microelectromechanical systems (mems) actuator with magnetic latching and methods for manufacturing and using the same8 Oct 2026US 2026/0307980 A1Atomic Machines, Inc.
- Mems varactor with contact-mode operation24 Sep 2026US 2026/0287445 A1Semtech Corporation
- Mems bridge24 Sep 2026US 2026/0290715 A1Sofant Technologies Ltd
- Methods for fabrication of mems devices17 Sep 2026US 2026/0274654 A1Omnitron Sensors Inc.
- Method for producing a microstructural element and microstructural element10 Sep 2026US 2026/0265049 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Most cited
By later US patents
- Method of manufacturing an X-ray exposure mask and device for controlling the internal stress of thin films246US 5,188,706 AKabushiki Kaisha Toshiba · 1993
- Thin film-structure and a method for producing the same240US 6,759,261 B2Tokyo Institute of Technology · 2004
- Microfluidic device with controlled substrate conductivity125US 7,195,986 B1Caliper Life Sciences, Inc. · 2007
- Use of silicon oxynitride as a sacrificial material for microelectromechanical devices118US 6,174,820 B1Sandia Corporation · 2001
- Method of making superhard tips for micro-probe microscopy and field emission116US 5,393,647 A1995