Mems varactor with contact-mode operation

A method of manufacturing a microelectromechanical system (MEMS) force sensor, the method comprising:

• attaching a first electrode to a flexible member, the first electrode being configured to operate at a first voltage;
• attaching a second electrode to a substrate beneath the flexible member;
• attaching a third electrode to the substrate, wherein the second electrode and the third electrode are configured to operate at a second voltage that is different from the first voltage and the second and third electrodes are separate from one another;
• forming a dielectric material covering at least one of:
• the first contact surface;
• and
• both the second contact surface and the third contact surface;
• wherein the flexible member is configured such that:
• if the dielectric material covers the first contact surface, the dielectric material does not contact the second and third contact surfaces in a first position of the flexible member;
• if the dielectric material covers the first contact surface, the flexible member is configured so that a variable portion of the dielectric material is configured to contact the second contact surface and the third contact surface;
• if the dielectric material covers both the second contact surface and the third contact surface, the dielectric material does not contact the first contact surface in the first position of the flexible member;
• and
• configuring a measurement device to measure a variable capacitance between the first electrode and the second and third electrodes.

A user element comprising a microelectromechanical system (MEMS) force sensor, the MEMS force sensor comprising:

• a flexible member;
• a first electrode attached to the flexible member, the first electrode being configured to operate at a first voltage;
• a substrate;
• a dielectric material;
• a second electrode attached to the substrate;
• the first electrode defining a first contact surface;
• the second electrode defining a second contact surface;
• a third electrode defining a third contact surface;
• the second electrode and the third electrode being configured to operate at a second voltage that is different from the first voltage;
• the dielectric material covers at least one of:
• the first contact surface;
• and
• both the second contact surface and the third contact surface;
• the flexible member is configured such that:
• if the dielectric material covers the first contact surface, the dielectric material does not contact the second and third contact surfaces in a first position of the flexible member;
• if the dielectric material covers the first contact surface, the flexible member is configured so that a variable portion of the dielectric material is configured to contact the second contact surface and the third contact surface;
• if the dielectric material covers both the second contact surface and the third contact surface, the dielectric material does not contact the first contact surface in the first position of the flexible member;
• if the dielectric material covers both the second contact surface and the third contact surface, the flexible member is configured so that a variable portion of the dielectric material is configured to contact the first contact surface;
• and
• a measurement device configured to measure a variable capacitance between the first electrode and the second and third electrodes.