B81C 1/0065
Mechanical properties
Official title: {Mechanical properties}
B81C1/0065 (Mechanical properties) appears on 370 US grants and 416 published applications in this corpus.
Search patents in B81C- Granted patents
- 370
- Published applications
- 416
- Assignees
- 226
- Inventors
- 889
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 3 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 2 | 0 |
| 1999 | 6 | 0 |
| 2000 | 0 | 0 |
| 2001 | 11 | 3 |
| 2002 | 6 | 8 |
| 2003 | 9 | 10 |
| 2004 | 12 | 12 |
| 2005 | 6 | 8 |
| 2006 | 7 | 11 |
| 2007 | 6 | 12 |
| 2008 | 10 | 9 |
| 2009 | 9 | 11 |
| 2010 | 13 | 10 |
| 2011 | 7 | 17 |
| 2012 | 6 | 14 |
| 2013 | 11 | 19 |
| 2014 | 13 | 10 |
| 2015 | 20 | 22 |
| 2016 | 27 | 29 |
| 2017 | 24 | 27 |
| 2018 | 25 | 36 |
| 2019 | 28 | 22 |
| 2020 | 23 | 16 |
| 2021 | 19 | 18 |
| 2022 | 14 | 12 |
| 2023 | 17 | 20 |
| 2024 | 12 | 22 |
| 2025 | 11 | 23 |
| 2026 | 8 | 15 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81C 1/00666Treatments for controlling internal stress or strain in mems structures237
- B81C 1/00682Treatments for improving mechanical properties, not provided for in b81c1/00658 - b81c1/006557
- B81C 1/00658Treatments for improving the stiffness of a vibrating element44
- B81C 1/00674Treatments for improving wear resistance34
Recent patents
- Microscale flexible strain sensor8 Sep 2026US 12,729,106 B2Carnegie Mellon University
- Decoupling method for semiconductor device23 Jun 2026US 12,662,371 B2STMicroelectronics International N. V.
- Method for manufacturing mirror device23 Jun 2026US 12,662,373 B2Hamamatsu Photonics K.K.
- Method for manufacturing a low-noise electroacoustic transducer5 May 2026US 12,621,612 B2Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Stress isolation for integrated circuit package integration28 Apr 2026US 12,612,303 B2Analog Devices, Inc.
- Mems bridge24 Sep 2026US 2026/0290715 A1Sofant Technologies Ltd
- Methods for fabrication of mems devices17 Sep 2026US 2026/0274654 A1Omnitron Sensors Inc.
- Method for producing a microstructural element and microstructural element10 Sep 2026US 2026/0265049 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Micromechanical component for a sensor device, microphone device and/or micro-loudspeaker device27 Aug 2026US 2026/0250121 A1
- Mems comprising a comb drive, and method for producing same6 Aug 2026US 2026/0225874 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Most cited
By later US patents
- Method of manufacturing an X-ray exposure mask and device for controlling the internal stress of thin films246US 5,188,706 AKabushiki Kaisha Toshiba · 1993
- Thin film-structure and a method for producing the same240US 6,759,261 B2Tokyo Institute of Technology · 2004
- Use of silicon oxynitride as a sacrificial material for microelectromechanical devices118US 6,174,820 B1Sandia Corporation · 2001
- Method of making superhard tips for micro-probe microscopy and field emission116US 5,393,647 A1995
- Method of fabrication of an infrared radiation detector and infrared detector device104US 6,194,722 B1Interuniversitair Micro-Elektronica Centrum (IMEC vzw) · 2001