B81C 1/00015
Manufacture or treatment of devices or systems in or on a substrate
Official title: {for manufacturing microsystems}
B81C1/00015 (Manufacture or treatment of devices or systems in or on a substrate) appears on 6,555 US grants and 7,715 published applications in this corpus.
Search patents in B81C- Granted patents
- 6,555
- Published applications
- 7,715
- Assignees
- 1,695
- Inventors
- 10,562
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 0 | 0 |
| 1986 | 4 | 0 |
| 1987 | 3 | 0 |
| 1988 | 2 | 0 |
| 1989 | 2 | 0 |
| 1990 | 3 | 0 |
| 1991 | 3 | 0 |
| 1992 | 4 | 0 |
| 1993 | 4 | 0 |
| 1994 | 11 | 0 |
| 1995 | 10 | 0 |
| 1996 | 19 | 0 |
| 1997 | 22 | 0 |
| 1998 | 38 | 0 |
| 1999 | 31 | 0 |
| 2000 | 44 | 0 |
| 2001 | 34 | 28 |
| 2002 | 69 | 117 |
| 2003 | 85 | 136 |
| 2004 | 122 | 223 |
| 2005 | 131 | 212 |
| 2006 | 130 | 214 |
| 2007 | 141 | 288 |
| 2008 | 145 | 286 |
| 2009 | 159 | 324 |
| 2010 | 244 | 349 |
| 2011 | 240 | 319 |
| 2012 | 267 | 359 |
| 2013 | 316 | 386 |
| 2014 | 407 | 469 |
| 2015 | 444 | 507 |
| 2016 | 459 | 454 |
| 2017 | 445 | 459 |
| 2018 | 381 | 419 |
| 2019 | 387 | 376 |
| 2020 | 406 | 388 |
| 2021 | 299 | 338 |
| 2022 | 256 | 273 |
| 2023 | 231 | 235 |
| 2024 | 221 | 211 |
| 2025 | 200 | 194 |
| 2026 | 132 | 151 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81C 1/00261Processes for packaging mems devices2,179
- B81C 1/00023Without movable or flexible elements1,747
- B81C 1/00134Comprising flexible or deformable structures1,695
- B81C 1/00222Integrating an electronic processing unit with a micromechanical structure1,395
- B81C 1/00206Processes for functionalising a surface217
- B81C 1/00214Processes for the simultaneaous manufacturing of a network or an array of97
- B81C 1/00341Processes for manufacturing microsystems not provided for in groups b81c1/00023 - b81c1/0026168
- B81C 1/00198Comprising elements which are movable in relation to each other62
Recent patents
- Femtosecond laser surface processing for controlled fill and targeted deposition6 Oct 2026US 12,752,371 B1Honeywell Federal Manufacturing & Technologies, LLC
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Multiple plated via arrays of different wire heights on a same substrate6 Oct 2026US RE51,062 E1Adeia Semiconductor Technologies LLC
- Methods of producing an electrode array29 Sep 2026US 12,746,404 B2Novocure GmbH
- Packaging method for mems acoustic device structure, mems acoustic device packaging structure and mems chip packaging method for acoustic device8 Oct 2026US 2026/0307982 A1Hefei Smat Technology Co., Ltd.
- Anchor structure1 Oct 2026US 2026/0296876 A1Lawrence Semiconductor Research Laboratory, Inc.
- Electronic devices and methods of manufacturing electronic devices1 Oct 2026US 2026/0296878 A1Amkor Technology Singapore Holding Pte. Ltd.
- Micro-electro-mechanical system package and fabrication method thereof1 Oct 2026US 2026/0296879 A1Vanguard International Semiconductor Corporation
- Wafer level proximity sensor and method of making same1 Oct 2026US 2026/0296880 A1STMicroelectronics International N. V.
Most cited
By later US patents
- Formation of microstamped patterns on surfaces and derivative articles1,049US 5,512,131 APresident and Fellows of Harvard College · 1996
- Microneedle devices and methods of manufacture and use thereof907US 6,334,856 B12002
- Microfluidic structure and process for its manufacture704US 5,376,252 APharmacia Biosensor AB · 1994
- Microneedle device for transport of molecules across tissue634US 6,503,231 B1Georgia Tech Research Corporation · 2003
- Microfabricated elastomeric valve and pump systems619US 6,408,878 B1California Institute of Technology · 2002