Electronic devices and methods of manufacturing electronic devices

An electronic device, comprising:

• a first substrate defining a first port;
• a first electronic component including a first microelectromechanical system (MEMS) speaker disposed over the first port and coupled to an inner side of the first substrate;
• a cavity substrate defining a cavity and a side port, the cavity substrate coupled to the inner side of the first substrate with the first electronic component extending into the cavity;
• and
• a second substrate having an inner side of the second substrate coupled to the cavity substrate opposite the first substrate.

A method of making an electronic device, comprising:

• providing a first substrate defining a port;
• coupling an electronic component to an inner side of the first substrate, the electronic component including a first microelectromechanical system (MEMS) device and disposed over the port;
• coupling a cavity substrate to the inner side of the first substrate, wherein the electronic component extends into a cavity;
• and
• coupling a second substrate to the cavity substrate opposite the first substrate;
• and
• coupling a first lid to an outer side of the first substrate, wherein a first volume is defined between the first lid and the first substrate, wherein the volume is in fluid communication with the port.