B81C 1/00134
Comprising flexible or deformable structures
Official title: {comprising flexible or deformable structures (manufacture of MEMS devices for specific applications, see relevant places, e.g. gyroscopes G01C19/5719, pressure sensors G01L9/0042, accelerometers G01P15/0802, acoustic transducers or diaphragms therefor H04R31/00)}
B81C1/00134 (Comprising flexible or deformable structures) appears on 1,695 US grants and 1,873 published applications in this corpus.
Search patents in B81C- Granted patents
- 1,695
- Published applications
- 1,873
- Assignees
- 580
- Inventors
- 2,820
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 3 | 0 |
| 1987 | 2 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 2 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 4 | 0 |
| 1995 | 3 | 0 |
| 1996 | 9 | 0 |
| 1997 | 7 | 0 |
| 1998 | 14 | 0 |
| 1999 | 10 | 0 |
| 2000 | 10 | 0 |
| 2001 | 7 | 8 |
| 2002 | 17 | 38 |
| 2003 | 20 | 31 |
| 2004 | 34 | 45 |
| 2005 | 30 | 33 |
| 2006 | 20 | 37 |
| 2007 | 28 | 52 |
| 2008 | 37 | 38 |
| 2009 | 32 | 64 |
| 2010 | 52 | 67 |
| 2011 | 43 | 61 |
| 2012 | 45 | 55 |
| 2013 | 62 | 96 |
| 2014 | 108 | 125 |
| 2015 | 117 | 117 |
| 2016 | 122 | 124 |
| 2017 | 103 | 120 |
| 2018 | 112 | 121 |
| 2019 | 110 | 110 |
| 2020 | 120 | 115 |
| 2021 | 82 | 98 |
| 2022 | 81 | 82 |
| 2023 | 76 | 84 |
| 2024 | 68 | 66 |
| 2025 | 54 | 47 |
| 2026 | 48 | 39 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81C 1/00158Diaphragms, membranes655
- B81C 1/00182Arrangements of deformable or non-deformable structures391
- B81C 1/0015Cantilevers315
- B81C 1/00166Electrodes161
- B81C 1/00142Bridges157
- B81C 1/0019Flexible or deformable structures not provided for in groups b81c1/00142 - b81c1/00182106
- B81C 1/00174See-saws21
Recent patents
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Methods of producing an electrode array29 Sep 2026US 12,746,404 B2Novocure GmbH
- Composite spring structure to reinforce mechanical robustness of a mems device29 Sep 2026US 12,747,153 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Method of fabricating micro-electromechanical system device22 Sep 2026US 12,741,865 B2Vanguard International Semiconductor Corporation
- Manufacturing a microphone by bonding layers1 Oct 2026US 2026/0296881 A1InvenSense, Inc.
- Micro-electro-mechanical systems (mems) having vertical stops and anchor structures10 Sep 2026US 2026/0265046 A1Lawrence Semiconductor Research Laboratory, Inc.
- Three dimensional trace for micro-electromechanical system (mems) devices27 Aug 2026US 2026/0250123 A1Lumentum Operations LLC
- Alignment of substrate cavity13 Aug 2026US 2026/0233987 A1
- MEMS Resonator13 Aug 2026US 2026/0233990 A1SiTime Corporation
Most cited
By later US patents
- Structure of an optical interference display cell261US 6,882,458 B2Prime View International Co., Ltd. · 2005
- Method of fabricating suspended microstructures245US 6,465,355 B1Hewlett-Packard Company · 2002
- Microstructures and single mask, single-crystal process for fabrication thereof160US 5,719,073 ACornell Research Foundation, Inc. · 1998
- Three-axis accelerometers and fabrication methods159US 7,892,876 B2Qualtre, Inc. · 2011
- MEMS process and device157US 7,781,249 B2Wolfson Microelectronics plc · 2010