B81C 1/00158
Diaphragms, membranes
Official title: {Diaphragms, membranes (manufacture process for semi-permeable inorganic membranes B01D67/0039)}
B81C1/00158 (Diaphragms, membranes) appears on 655 US grants and 725 published applications in this corpus.
Search patents in B81C- Granted patents
- 655
- Published applications
- 725
- Assignees
- 248
- Inventors
- 1,123
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 4 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 3 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 3 |
| 2002 | 4 | 3 |
| 2003 | 8 | 3 |
| 2004 | 2 | 8 |
| 2005 | 5 | 9 |
| 2006 | 2 | 6 |
| 2007 | 5 | 7 |
| 2008 | 5 | 7 |
| 2009 | 4 | 14 |
| 2010 | 10 | 15 |
| 2011 | 11 | 16 |
| 2012 | 10 | 16 |
| 2013 | 18 | 38 |
| 2014 | 43 | 60 |
| 2015 | 58 | 58 |
| 2016 | 55 | 51 |
| 2017 | 47 | 60 |
| 2018 | 54 | 55 |
| 2019 | 56 | 49 |
| 2020 | 52 | 56 |
| 2021 | 33 | 42 |
| 2022 | 38 | 43 |
| 2023 | 42 | 42 |
| 2024 | 30 | 31 |
| 2025 | 28 | 17 |
| 2026 | 19 | 16 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Mechanically coupled piezoelectric mems microphone25 Aug 2026US 12,715,759 B2Skyworks Solutions, Inc.
- Method for manufacturing a structure comprising a plurality of membranes overhanging cavities25 Aug 2026US 12,715,764 B2Commissariat A L'energie Atomique Et Aux Energies
- MEMS loudspeaker manufacturing method and MEMS loudspeaker21 Jul 2026US 12,686,614 B2Aac Kaitai Technologies (Wuhan) Co., Ltd
- Manufacturing a microphone by bonding layers1 Oct 2026US 2026/0296881 A1InvenSense, Inc.
- MEMS Resonator13 Aug 2026US 2026/0233990 A1SiTime Corporation
- Micromechanical component for a capacitive sensor and/or actuator device16 Jul 2026US 2026/0200724 A1
- Cmos ultrasonic transducers and related apparatus and methods9 Jul 2026US 2026/0192332 A1Bfly Operations, Inc.
- Semiconductor device and methods of formation25 Jun 2026US 2026/0182251 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- MEMS process and device157US 7,781,249 B2Wolfson Microelectronics plc · 2010
- Micromachined ultrasonic transducers and method of fabrication148US 6,958,255 B2The Board of Trustees of the Leland Stanford Junior University · 2005
- Microfabricated apertures for supporting bilayer lipid membranes144US 6,863,833 B1The Board of Trustees of the Leland Stanford Junior University · 2005
- MEMS process and device117US 7,856,804 B2Wolfson Microelectronics plc · 2010
- Microfabricated filter and shell constructed with a permeable membrane96US 5,919,364 AThe Regents of the University of California · 1999