Mechanically coupled piezoelectric mems microphone
AssigneeSkyworks Solutions, Inc.
InventorSiarhei Dmitrievich Barsukou
Life of this patent
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Abstract
There is provided a piezoelectric microelectromechanical systems microphone comprising a sensor including at least one piezoelectric layer, at least one constraint in contact with the sensor at a position, such that the sensor is supported by the at least one constraint, and such that the sensor that the sensor has a membrane region to one side of the at least one constraint and a cantilevered region to the other side of the at least one constraint and a cavity defined at least partially by the at least one constraint. There is also provided a method of manufacturing the microphone.
Claims18
A piezoelectric microelectromechanical systems microphone comprising:
- a sensor including at least one piezoelectric layer;
- at least one constraint in contact with the sensor, the sensor being supported by the at least one constraint, the sensor having a membrane region to one side of the at least one constraint and a cantilevered region to an other side of the at least one constraint, the at least one constraint including an upper constraint and a lower constraint, the upper constraint being mechanically in contact with an upper side of the sensor, the lower constraint being mechanically in contact with a lower side of the sensor;
- and
- a cavity defined at least partially by the at least one constraint.
A piezoelectric microelectromechanical systems microphone comprising:
- a sensor including at least one piezoelectric layer;
- multiple constraints in contact with the sensor and supporting the sensor, the sensor having a membrane region to a first side of the multiple constraints and a cantilevered region to a second side of the multiple constraints, the second side opposite the first side, each of the multiple constraints being annular sectors of a single circle separated by a plurality of air gaps, the plurality of air gaps providing for air to flow from underneath the membrane region to underneath the cantilevered region;
- and
- a cavity defined at least partially by the multiple constraints.
Dependencies are inferred from the claim text.