Micromechanical component for a capacitive sensor and/or actuator device

A capacitive sensor and/or actuator device, comprising:

• a micromechanical component including:
• a deformable first membrane and a deformable second membrane, which are tensioned on and/or in a holder of the micromechanical component in such a way that an internal volume is bounded on a first side by a first membrane surface of the first membrane and on a second side, which is directed away from the first side, by a second membrane surface of the second membrane, and
• at least one first electrode arranged in the internal volume, wherein the first electrode includes continuous recesses, each of the recesses being a slot extending along a straight or non-straight slot center longitudinal line of the slot,
• wherein the slots in the first electrode are configured such that a straight line that can be defined for each slot of the slots and passes through a first endpoint of the slot center longitudinal line of the slot lying on an edge of the slot and through a second endpoint of the slot center longitudinal line of the slot lying on the edge of the slot:
• (i) extends radially away from a center point of the first electrode with a deviation of less than or equal to 20° or (ii) extends perpendicularly away from a central axis of the first electrode, which intersects the first electrode at a center of the first electrode and with an equal total number of the slots on each of two sides of the first electrode, with a deviation of less than or equal to 20°.

A production method for a micromechanical component for a capacitive sensor and/or actuator device, comprising the following steps:

• tensioning a deformable first membrane and a deformable second membrane on and/or in a holder of the produced micromechanical component in such a way that an internal volume is bounded on a first side by a first membrane surface of the first membrane and on a second side, which is directed away from the first side, by a second membrane surface of the second membrane;
• and
• arranging at least one first electrode in the internal volume, wherein the first electrode is configured with continuous recesses, each recess of the recesses being a slot extending along a straight or non-straight slot center longitudinal line of the slot;
• wherein each slot of the slots in the first electrode are configured such that a straight line that can be defined for the slot and passes through a first endpoint of the slot center longitudinal line of the slot lying on an edge of the slot and through a second endpoint of the slot center longitudinal line of the slot lying on the edge of the slot:
• (i) extends radially away from a center point of the first electrode with a deviation of less than or equal to 20° or (ii) extends perpendicularly away from a central axis of the first electrode, which intersects the first electrode at a center of the first electrode and with an equal total number of the slots on each of two sides of the first electrode, with a deviation of less than or equal to 20°.