B81C 1/00182
Arrangements of deformable or non-deformable structures
Official title: {Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer}
B81C1/00182 (Arrangements of deformable or non-deformable structures) appears on 391 US grants and 454 published applications in this corpus.
Search patents in B81C- Granted patents
- 391
- Published applications
- 454
- Assignees
- 200
- Inventors
- 819
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 2 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 4 |
| 2002 | 3 | 13 |
| 2003 | 4 | 8 |
| 2004 | 13 | 15 |
| 2005 | 5 | 8 |
| 2006 | 8 | 12 |
| 2007 | 5 | 9 |
| 2008 | 14 | 11 |
| 2009 | 10 | 20 |
| 2010 | 15 | 14 |
| 2011 | 15 | 18 |
| 2012 | 11 | 20 |
| 2013 | 20 | 13 |
| 2014 | 18 | 21 |
| 2015 | 22 | 23 |
| 2016 | 22 | 20 |
| 2017 | 21 | 31 |
| 2018 | 23 | 32 |
| 2019 | 25 | 30 |
| 2020 | 29 | 28 |
| 2021 | 20 | 26 |
| 2022 | 27 | 19 |
| 2023 | 10 | 19 |
| 2024 | 23 | 24 |
| 2025 | 11 | 10 |
| 2026 | 13 | 6 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method of fabricating micro-electromechanical system device22 Sep 2026US 12,741,865 B2Vanguard International Semiconductor Corporation
- Method for manufacturing a structure comprising a plurality of membranes overhanging cavities25 Aug 2026US 12,715,764 B2Commissariat A L'energie Atomique Et Aux Energies
- Multi-level mems process18 Aug 2026US 12,709,540 B2InvenSense, Inc.
- MEMS pressure sensor built using the beol metal layers of a solid-state semiconductor process11 Aug 2026US 12,703,621 B2Nanusens SL
- MEMS pressure sensor11 Aug 2026US 12,704,427 B2MEI Micro, Inc.
- Micro-electro-mechanical systems (mems) having vertical stops and anchor structures10 Sep 2026US 2026/0265046 A1Lawrence Semiconductor Research Laboratory, Inc.
- Capacitive microelectromechanical pressure transducer and related manufacturing process28 May 2026US 2026/0145928 A1STMicroelectronics International N. V.
- Fabrication methods of semiconductor substrates30 Apr 2026US 2026/0123285 A1Vanguard International Semiconductor Corporation
- Method of forming micro-electromechanical system device2 Apr 2026US 2026/0091971 A1Vanguard International Semiconductor Corporation
- Semiconductor device and method of manufacturing same12 Mar 2026US 2026/0070086 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Structure of an optical interference display cell261US 6,882,458 B2Prime View International Co., Ltd. · 2005
- Three-axis accelerometers and fabrication methods159US 7,892,876 B2Qualtre, Inc. · 2011
- Interference display unit138US 6,995,890 B2Prime View International Co., Ltd. · 2006
- Micromachined microphone and multisensor and method for producing same136US 7,825,484 B2Analog Devices, Inc. · 2010
- Thin film precursor stack for MEMS manufacturing122US 7,221,495 B2Idc, LLC · 2007