Method of forming micro-electromechanical system device
AssigneeVanguard International Semiconductor Corporation
InventorsJIA JIE XIA, RAKESH KUMAR
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Abstract
A method of forming a micro-electromechanical system (MEMS) device includes: providing a substrate comprising a first surface and a second surface opposite to the first surface; forming a cavity in the substrate, the cavity extending between the first surface and the second surface; forming an interconnection structure on the first surface of the substrate and over the cavity; and forming a proof mass in the cavity, connected to the interconnection structure, the proof mass having a thickness which is smaller than a thickness of the substrate.
Claims14
A method of forming a micro-electromechanical system device comprising:
- providing a substrate, the substrate comprising a first surface and a second surface opposite to the first surface;
- forming a cavity in the substrate, the cavity extending between the first surface and the second surface;
- forming an interconnection structure on the first surface of the substrate, the interconnection structure being located over the cavity;
- and
- forming a proof mass in the cavity, connected to the interconnection structure, the proof mass having a thickness which is smaller than a thickness of the substrate.
Dependencies are inferred from the claim text.