Micro-electro-mechanical systems (mems) having vertical stops and anchor structures

A microelectromechanical system (MEMS) device, comprising:

• a substrate;
• a first intermediate layer overlying the substrate;
• a device layer overlying the first intermediate layer and comprising a moving mass operable to move relative to the substrate within a gap characterized by absence of the first intermediate layer underneath the device layer;
• wherein the moving mass includes a proof mass and at least one stop structure that is monolithic with the proof mass and that extends from a lower surface of the proof mass toward the substrate;
• wherein the at least one stop structure comprises a material of the device layer and prevents a lower surface of the proof mass from contacting the substrate to limit extent of motion of the moving mass relative to the substrate;
• and wherein the first intermediate layer and the device layer have dislocations to remove strain.