B81C 1/00142
Bridges
Official title: {Bridges (deformable micromirrors G02B26/0841)}
B81C1/00142 (Bridges) appears on 157 US grants and 160 published applications in this corpus.
Search patents in B81C- Granted patents
- 157
- Published applications
- 160
- Assignees
- 112
- Inventors
- 348
- Latest grant
- 24 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 3 | 0 |
| 1998 | 3 | 0 |
| 1999 | 2 | 0 |
| 2000 | 3 | 0 |
| 2001 | 1 | 0 |
| 2002 | 6 | 5 |
| 2003 | 1 | 4 |
| 2004 | 3 | 9 |
| 2005 | 6 | 9 |
| 2006 | 6 | 12 |
| 2007 | 11 | 12 |
| 2008 | 9 | 12 |
| 2009 | 9 | 11 |
| 2010 | 13 | 10 |
| 2011 | 4 | 3 |
| 2012 | 10 | 6 |
| 2013 | 4 | 1 |
| 2014 | 7 | 7 |
| 2015 | 8 | 7 |
| 2016 | 7 | 6 |
| 2017 | 3 | 0 |
| 2018 | 6 | 6 |
| 2019 | 2 | 6 |
| 2020 | 6 | 4 |
| 2021 | 3 | 7 |
| 2022 | 5 | 3 |
| 2023 | 6 | 6 |
| 2024 | 1 | 7 |
| 2025 | 6 | 3 |
| 2026 | 1 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- MEMS switch device and electronic apparatus24 Feb 2026US 12,559,361 B2Boe Technology Group Co., Ltd.
- MEMS switch, preparation method thereof, and electronic apparatus11 Nov 2025US 12,466,723 B2Beijing BOE Technology Development Co., Ltd.
- Piezoelectric micro mirror with corrugated actuator and suspension system4 Nov 2025US 12,461,358 B2Infineon Technologies AG
- Batch fabrication of MEMS scanning mirror13 May 2025US 12,298,492 B2The Texas A&M University System
- Method for manufacturing mirror device1 Apr 2025US 12,264,065 B2Hamamatsu Photonics K.K.
- Three dimensional trace for micro-electromechanical system (mems) devices27 Aug 2026US 2026/0250123 A1Lumentum Operations LLC
- Mems device built using the beol metal layers of a solid state semiconductor process16 Jul 2026US 2026/0200722 A1Nanusens SL
- Method for attaching a bridging metal layer in via holes for supporting posts19 Feb 2026US 2026/0048982 A1National Chung Shan Institute of Science and Technology
- Method of manufacturing a layered structure for a mems apparatus and mems apparatus with such a layered structure15 Jan 2026US 2026/0016683 A1OQmented GmbH
- Micro-electromechanical devices2 Oct 2025US 2025/0304427 A1Honeywell International Inc.
Most cited
By later US patents
- Method of fabricating suspended microstructures245US 6,465,355 B1Hewlett-Packard Company · 2002
- Microstructures and single mask, single-crystal process for fabrication thereof160US 5,719,073 ACornell Research Foundation, Inc. · 1998
- Devices having vertically-disposed nanofabric articles and methods of making the same152US 6,924,538 B2Nantero, Inc. · 2005
- Electrically isolated released microstructures133US 5,847,454 ACornell Research Foundcatton, Inc. · 1998
- Microstructure and single mask, single-crystal process for fabrication thereof117US 5,846,849 ACornell Research Foundation, Inc. · 1998