Piezoelectric micro mirror with corrugated actuator and suspension system

A light steering system, comprising:

• a reflective structure configured to tilt about a first axis;
• a frame that is rotationally fixed, the frame comprising a frame recess over which the reflective structure is suspended;
• and
• a suspension assembly mechanically coupled to and between the reflective structure and the frame, the suspension assembly configured to suspend the reflective structure over the frame recess,
• wherein the suspension assembly comprises:
• a piezoelectric corrugated structure coupled to and between the reflective structure and the frame, wherein the piezoelectric corrugated structure comprises:
• a first corrugated surface comprising concentric rings of alternating peaks and valleys;
• a second corrugated surface arranged opposite to the first corrugated surface;
• a plurality of peak electrodes, each peak electrode being coupled to a respective peak of the first corrugated surface;
• a plurality of valley electrodes, each valley electrode being coupled to a respective valley of the first corrugated surface;
• and
• a common electrode layer coupled to the second corrugated surface, wherein the common electrode layer is arranged counter to the plurality of peak electrodes and to the plurality of valley electrodes.