MEMS switch device and electronic apparatus
AssigneeBoe Technology Group Co., Ltd.
InventorsZibo Cao, Yingli Shi, Jingwen Guo, Chunxin Li, Qianhong Wu, Jianyun Zhao, Jianxing Liu, Feng Qu
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AssigneeBoe Technology Group Co., Ltd.
InventorsZibo Cao, Yingli Shi, Jingwen Guo, Chunxin Li, Qianhong Wu, Jianyun Zhao, Jianxing Liu, Feng Qu
Estimating the term…
The present disclosure provides an MEMS switch device and an electronic apparatus. The MEMS switch device includes a base substrate, a membrane bridge structure, and a first ground line, a signal line and a second ground line sequentially arranged on a first side surface of the base substrate at intervals; the membrane bridge structure has a first end electrically connected to the first ground line, and a second end, opposite to the first end, electrically connected to the second ground line; and the membrane bridge structure includes a membrane bridge body structure and at least one protruding structure on the membrane bridge body structure, where the protruding structure protrudes from the membrane bridge body structure in a direction perpendicular to the first side surface of the base substrate.
A micro electro mechanical system (MEMS) switch device, comprising:
Dependencies are inferred from the claim text.