Batch fabrication of MEMS scanning mirror
AssigneeThe Texas A&M University System
InventorsJun Zou, Song Xu
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Abstract
Methods are disclosed for manufacturing a Micro-ElectroMechanical Systems (MEMS) scanning mirror. In an embodiment, one method includes depositing a hinge material on a substrate and removing first and second portions of the substrate to form an outer frame, an inner frame, and a mirror plate in the substrate. First and second portions of the hinge material rotationally couple the outer frame to the inner frame and the inner frame to the mirror plate for rotation about first and second orthogonal axes of rotation. In another embodiment, a third portion of the substrate rotationally couples the inner frame to the mirror plate. In still another embodiment, an elastomer material is configured as a bending hinge that rotationally couples the outer frame to the inner frame.
Claims18
A method for manufacturing a Micro-ElectroMechanical Systems (MEMS) scanning mirror, the method comprising:
- depositing a hinge material on a first side of a substrate, wherein the hinge material comprises biaxially-oriented polyethylene terephthalate (BoPET);
- etching the hinge material to form a hinge;
- removing a first portion of the substrate from a second side of the substrate to form an outer frame in the substrate;
- and
- removing a second portion of the substrate from the second side of the substrate to form an inner frame and a mirror plate in the substrate,
- a first portion of the hinge material rotationally coupling the outer frame to the inner frame for rotation about a first axis of rotation and a second portion of the hinge material rotationally coupling the inner frame to the mirror plate for rotation about a second axis of rotation, the first axis of rotation orthogonal to the second axis of rotation.
A method for manufacturing a Micro-ElectroMechanical Systems (MEMS) scanning mirror, the method comprising:
- depositing a hinge material on a first side of a substrate;
- removing a first portion of the substrate from a second side of the substrate to form an outer frame in the substrate;
- and
- removing a second portion of the substrate from the second side of the substrate to form an inner frame and a mirror plate in the substrate,
- a portion of the hinge material rotationally coupling the outer frame to the inner frame for rotation about a first axis of rotation and a third portion of the substrate rotationally coupling the inner frame to the mirror plate for rotation about a second axis of rotation, the first axis of rotation orthogonal to the second axis of rotation.
A method for manufacturing a Micro-ElectroMechanical Systems (MEMS) scanning mirror, the method comprising:
- depositing a hinge material on a first side of a substrate, wherein the hinge material covers less than all of the first side of the substrate;
- depositing an elastomer material separate from the hinge material on the first side of the substrate;
- removing a first portion of the substrate from a second side of the substrate to form an outer frame in the substrate;
- and
- removing a second portion of the substrate from the second side of the substrate to form an inner frame and a mirror plate in the substrate,
- etching the deposited elastomer material to form a hinge, whereby a portion of the elastomer material is configured as a bending hinge rotationally coupling the outer frame to the inner frame for rotation about a first axis of rotation,
- a portion of the hinge material is configured as a torsional hinge rotationally coupling the inner frame to the mirror plate for rotation about a second axis of rotation, the first axis of rotation orthogonal to the second axis of rotation.
Dependencies are inferred from the claim text.