H10P 14/6924
The material being halogen doped silicon oxides
Official title: {the material being halogen doped silicon oxides, e.g. FSG}
H10P14/6924 (The material being halogen doped silicon oxides) appears on 440 US grants and 251 published applications in this corpus.
Search patents in H10P- Granted patents
- 440
- Published applications
- 251
- Assignees
- 131
- Inventors
- 786
- Latest grant
- 2 Dec 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 6 | 0 |
| 1995 | 4 | 0 |
| 1996 | 7 | 0 |
| 1997 | 13 | 0 |
| 1998 | 9 | 0 |
| 1999 | 24 | 0 |
| 2000 | 38 | 0 |
| 2001 | 63 | 20 |
| 2002 | 53 | 41 |
| 2003 | 45 | 30 |
| 2004 | 35 | 26 |
| 2005 | 25 | 26 |
| 2006 | 23 | 28 |
| 2007 | 18 | 8 |
| 2008 | 9 | 7 |
| 2009 | 5 | 6 |
| 2010 | 7 | 6 |
| 2011 | 9 | 6 |
| 2012 | 4 | 0 |
| 2013 | 2 | 1 |
| 2014 | 1 | 1 |
| 2015 | 2 | 4 |
| 2016 | 1 | 4 |
| 2017 | 2 | 2 |
| 2018 | 2 | 4 |
| 2019 | 5 | 7 |
| 2020 | 5 | 4 |
| 2021 | 3 | 3 |
| 2022 | 3 | 8 |
| 2023 | 3 | 3 |
| 2024 | 4 | 3 |
| 2025 | 4 | 2 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Sequencing of the recipe steps for the optimal low-k HDP-CVD processing882US 5,937,323 AAPPLIED Materials.Inc. · 1999
- Sequencing of the recipe steps for the optimal low-dielectric constant HDP-CVD Processing817US 6,217,658 B1APPLIED Materials.Inc. · 2001
- Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process777US 5,000,113 AAPPLIED Materials.Inc. · 1991
- Organosilicon precursors for interlayer dielectric films with low dielectric constants652US 6,583,048 B2Air Products and Chemicals, Inc. · 2003
- Method of high density plasma CVD gap-filling588US 6,106,678 ALam Research Corporation · 2000