H01J 37/32091
The radio frequency energy being capacitively coupled to the plasma
Official title: {the radio frequency energy being capacitively coupled to the plasma}
H01J37/32091 (The radio frequency energy being capacitively coupled to the plasma) appears on 1,778 US grants and 2,644 published applications in this corpus.
Search patents in H01J- Granted patents
- 1,778
- Published applications
- 2,644
- Assignees
- 351
- Inventors
- 3,782
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 2 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 2 | 0 |
| 1987 | 1 | 0 |
| 1988 | 4 | 0 |
| 1989 | 3 | 0 |
| 1990 | 0 | 0 |
| 1991 | 4 | 0 |
| 1992 | 1 | 0 |
| 1993 | 2 | 0 |
| 1994 | 4 | 0 |
| 1995 | 5 | 0 |
| 1996 | 6 | 0 |
| 1997 | 6 | 0 |
| 1998 | 7 | 0 |
| 1999 | 12 | 0 |
| 2000 | 6 | 0 |
| 2001 | 7 | 3 |
| 2002 | 10 | 5 |
| 2003 | 10 | 18 |
| 2004 | 10 | 18 |
| 2005 | 11 | 25 |
| 2006 | 7 | 29 |
| 2007 | 10 | 61 |
| 2008 | 9 | 94 |
| 2009 | 16 | 110 |
| 2010 | 48 | 129 |
| 2011 | 45 | 137 |
| 2012 | 78 | 88 |
| 2013 | 87 | 98 |
| 2014 | 82 | 122 |
| 2015 | 86 | 169 |
| 2016 | 129 | 123 |
| 2017 | 101 | 118 |
| 2018 | 100 | 114 |
| 2019 | 115 | 141 |
| 2020 | 134 | 140 |
| 2021 | 96 | 114 |
| 2022 | 83 | 148 |
| 2023 | 86 | 208 |
| 2024 | 113 | 139 |
| 2025 | 130 | 138 |
| 2026 | 109 | 155 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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By later US patents
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