Efficient energy recovery in a nanosecond pulser circuit

A method comprising:

• closing one or more switches to create a first pulse, the one or more switches are coupled with an energy storage capacitor and a primary side of a transformer, wherein the first pulse has a voltage greater than about 1 kV and pulse width less than about 1,000 ns, and the first pulse is introduced into a plasma deposition chamber via a secondary side of the transformer;
• opening the one or more switches for period of time less than about 100 microseconds and allowing charge from the plasma deposition chamber to flow through an energy recovery circuit to the energy storage capacitor;
• closing the one or more switches to create a second pulse that is introduced into the plasma deposition chamber via a secondary side of the transformer;
• and
• opening the one or more switches for period of time less than about 100 microseconds and allowing charge from the plasma deposition chamber to flow through the energy recovery circuit to the energy storage capacitor.