H01J 2237/0475
Decelerating
Official title: decelerating
H01J2237/0475 (Decelerating) appears on 192 US grants and 192 published applications in this corpus.
Search patents in H01J- Granted patents
- 192
- Published applications
- 192
- Assignees
- 67
- Inventors
- 329
- Latest grant
- 4 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 1 | 0 |
| 1995 | 3 | 0 |
| 1996 | 2 | 0 |
| 1997 | 0 | 0 |
| 1998 | 5 | 0 |
| 1999 | 6 | 0 |
| 2000 | 5 | 0 |
| 2001 | 3 | 1 |
| 2002 | 7 | 3 |
| 2003 | 8 | 6 |
| 2004 | 1 | 7 |
| 2005 | 6 | 3 |
| 2006 | 6 | 9 |
| 2007 | 3 | 5 |
| 2008 | 6 | 7 |
| 2009 | 8 | 11 |
| 2010 | 6 | 6 |
| 2011 | 5 | 2 |
| 2012 | 5 | 7 |
| 2013 | 9 | 4 |
| 2014 | 4 | 3 |
| 2015 | 6 | 7 |
| 2016 | 6 | 10 |
| 2017 | 8 | 6 |
| 2018 | 8 | 4 |
| 2019 | 8 | 9 |
| 2020 | 8 | 8 |
| 2021 | 11 | 16 |
| 2022 | 6 | 9 |
| 2023 | 9 | 13 |
| 2024 | 7 | 14 |
| 2025 | 6 | 7 |
| 2026 | 7 | 15 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Method and apparatus for continuous chained energy ion implantation4 Aug 2026US 12,700,562 B2Axcelis Technologies, Inc.
- Blended energy implant9 Jun 2026US 12,651,722 B2Axcelis Technologies, Inc.
- High incidence angle graphite for particle control with dedicated low sputter yield ion beam10 Mar 2026US 12,571,088 B2Axcelis Technologies, Inc.
- Ion implantation device with energy filter having additional thermal energy dissipation surface area3 Mar 2026US 12,567,559 B2Mi2-Factory GmbH
- Charged particle assessment tool, inspection method10 Feb 2026US 12,548,735 B2ASML Netherlands B. V.
- Method and apparatus for continuous chained energy ion implantation1 Oct 2026US 2026/0302126 A1Axcelis Technologies, Inc.
- Blended energy implant17 Sep 2026US 2026/0279718 A1Axcelis Technologies, Inc.
- Composite Beam Apparatus13 Aug 2026US 2026/0237598 A1Hitachi High-Tech Corporation
- Charged Particle Beam Device6 Aug 2026US 2026/0229443 A1Hitachi High-Tech Corporation
- Ion implantation device18 Jun 2026US 2026/0171344 A1Sumitomo Heavy Industries Ion Technology Co., Ltd.
Most cited
By later US patents
- Particle-optical systems and arrangements and particle-optical components for such systems and arrangements98US 7,244,949 B2Applied Materials Israel Ltd. · 2007
- Scanning electron microscope90US 5,872,358 AHitachi, Ltd. · 1999
- Scanning electron microscope66US 6,847,038 B2Hitachi, Ltd. · 2005
- Twin beam charged particle column and method of operating thereof61US 8,378,299 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · 2013
- Apparatus for ion-plasma machining workpiece surfaces including improved decelerating system53US 5,262,611 AHauzer Holding B.V. · 1993