US 5,262,611 AGranted

Apparatus for ion-plasma machining workpiece surfaces including improved decelerating system

AssigneeHauzer Holding B.V.

InventorsSergey V. Danysh, Alexey N. Lobanov, Andrey V. Obukhov, Vladimir A. Obukhov

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Abstract

Apparatus comprises a vacuum chamber (1) accommodating a source (2) of ion flow directed toward the surface being machined, and a system (3) for decelerating ion flow. The system (3) includes a shielding electrode (5) positioned before the workpieces (4) and having a hole (7) for the passage of ion flow, and at least one decelerating electrode (6) electrically insulated from the walls of the vacuum chamber (1) and shielding electrode (5). The decelerating electrode (6) has the form of a magnetic element whose magnetization vector (M) is substantially congruent with the workpiece surface being machined. In addition, line (13) of electron drift current is closed in a direction transverse of the direction of the ion flow.

Claims13

Dependent claims

An apparatus for ion-plasma machining workpiece surfaces, the apparatus including a workpiece (4) to be machined, the apparatus comprising a vacuum chamber (1) accommodating a source (2) of ion flow oriented toward the workpiece surface being machined, characterized in that the apparatus is provided with a system (3) for decelerating ion flow, the system including closed electron drift current, the system comprising

a shielding electrode (5) having a hole (7) for the passage of ion flow to workpiece surface machining zone,
at least one decelerating electrode (6) electrically insulated from the walls of the vacuum chamber (1) and from shielding electrode (5), the decelerating electrode comprising a magnetic whose magnetization vector (M) is substantially parallel with the surface of workpiece (4) secured thereon, and
wherein the lines of electron drift current are substantially transverse to the direction of the ion flow.

Dependencies are inferred from the claim text.