Charged Particle Beam Device

Abstract

This charged particle beam device includes: a charged particle gun (100) that comprises a charged particle source (101); and a charged particle optical system that focuses a charged particle beam (110) from the charged particle gun (100) onto a sample, wherein: the charged particle gun (100) comprises a first electrode (102) positioned below the charged particle source (101) and an acceleration electrode (104) positioned below the first electrode (102); an optic axis is included between the first electrode (102) and the acceleration electrode (104); and an equipotential space is formed that is equipotential to the voltage of the first electrode (102) in the traveling direction of the charged particles from the charged particle source (101) or has a constant voltage difference with respect to the voltage of the first electrode (102). The charged particle optical system comprises a magnetic field lens (105) disposed so that the primary surface thereof crosses the equipotential space.

Dependencies are inferred from the claim text.