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US 12,548,735 B2Granted
Charged particle assessment tool, inspection method
AssigneeASML Netherlands B.V.
InventorMarco Jan-Jaco Wieland
Life of this patent
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Abstract
A charged particle assessment tool includes: an objective lens configured to project a plurality of charged particle beams onto a sample, the objective lens having a sample-facing surface defining a plurality of beam apertures through which respective ones of the charged particle beams are emitted toward the sample; and a plurality of capture electrodes adjacent respective ones of the beam apertures and configured to capture charged particles emitted from the sample.
Claims20
A multi-beam charged particle system comprising:
- an optical column configured to direct a multi-beam towards a sample, the multi-beam being generated down-beam from a source;
- and
- a detector configured to capture charged particles emitted from the sample, wherein the detector is actuatable along the path of the multi-beam.
An inspection method comprising:
- emitting a multi-beam of a plurality of charged-particle beams to a sample;
- and
- capturing charged particles emitted by the sample in response to the charged-particle beams using a detector;
- and
- changing a position of the detector along a path of the multi-beam.
2 more elements
A charged particle assessment tool comprising:
- an objective lens configured to project a plurality of charged particle beams onto a sample;
- and
- a sensor array comprising sensor units configured to capture charged particles emitted from the sample,
- wherein the sensor array is configured to be adjustable between positions along beam paths of the charged particle beams.
1 more element
Dependencies are inferred from the claim text.