Ion implantation device with energy filter having additional thermal energy dissipation surface area
AssigneeMi2-Factory GmbH
InventorsFlorian Krippendorf, Constantin Csato
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Abstract
An ion implantation device (20) comprising an energy filter (25), wherein the energy filter (25) has a thermal energy dissipation surface area, wherein the energy filter (25) comprises a membrane with a first surface and a second surface disposed opposite to the first surface, the first surface being a structured surface.
Claims20
An ion implantation device comprising an energy filter, wherein the energy filter has a thermal energy dissipation surface area, wherein the energy filter comprises a membrane with a first surface and a second surface disposed opposite to the first surface, the first surface being a structured surface, further comprising a housing, wherein the energy filter is mounted in the housing, and a plurality of absorber elements different from the housing, the absorber elements being in thermal contact with the housing and blocking for visible and infra-red light.
A housing for an energy filter of an ion implantation device, wherein the housing comprises a plurality of conduits for transferring cooling fluid, wherein the energy filter is mounted in the housing, wherein the housing further comprises a plurality of separate absorber elements in thermal contact with the housing blocking for visible and infra-red light.
Dependencies are inferred from the claim text.