Scanning electron microscope
AssigneeHitachi, Ltd.
InventorsHideo Todokoro, Makoto Ezumi, Yoichi Ose, Naomasa Suzuki
Life of this patent
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Abstract
A scanning electron microscope with an energy filter which can positively utilize secondary electrons and/or reflected electrons which collide against a mesh electrode and are lost. The scanning electron microscope which has a porous electrode for producing an electric field for energy-filtering electrons produced by applying a primary electron beam to a sample and a 1st electron detector which detects electrons passing through the porous electrode is characterized by further having a porous structure provided near the sample, a deflector which deflects electrons from the axis of the primary electron beam, and a 2nd electron detector which detects the electrons deflected by the deflector.
Claims12
A scanning electron microscope comprising an electron source, a focusing lens for focusing a primary electron beam emitted by said electron source, and an energy filter for energy-filtering an electron emitted by a sample, the scanning electron microscope further comprising a first detector for detecting the energy-filtered electron, and a second detector for detecting a non-energy filtered electron.
A scanning electron microscope comprising an electron source, a focusing lens for focusing a primary electron beam emitted by said electron source, and an energy filter for energy-filtering electrons emitted by a sample, the scanning electron microscope further comprising:
- a detector for detecting an energy-filtered electron;
- a detector for detecting a non-energy filtered electron;
- and
- a control apparatus for determining whether a wire formed on said sample is normal or defective based on the outputs of said detectors.
A wiring examination method, comprising the steps of:
- irradiating a wire formed on a sample with a primary electron beam;
- detecting electrons energy-filtered by an energy filter;
- and
- determining whether said wire is normal or defective based on an output of a detector that detects an electron emitted by said wire as an energy-filter voltage is varied.
Dependencies are inferred from the claim text.