Composite Beam Apparatus
AssigneeHitachi High-Tech Corporation
InventorsYo YAMAMOTO, Hiroshi OBA, Yasutaka OTSUKA, Yasuhiko SUGYAMA
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Abstract
To implement a composite beam apparatus 10 capable of reducing a size of a gas ion beam lens barrel while removing neutral particles generated by a gas ion source. The composite beam apparatus 10 includes a focused ion beam device 14, an electron beam device 15, and a low-acceleration gas ion beam device 18. The low-acceleration gas ion beam device 18 includes a gas ion source 30, an ion beam deflection unit 31 connected to the gas ion source 30, and an ion beam housing 32 connected to the ion beam deflection unit 31 via a bent portion 26. The ion beam deflection unit 31 and the ion beam housing 32 are connected and inclined to each other via the bent portion 26.
Claims6
A composite beam apparatus comprising:
- a focused ion beam device;
- an electron beam device;
- and
- a low-acceleration gas ion beam device, wherein
- the low-acceleration gas ion beam device includes:
- a gas ion source;
- an ion beam deflection unit connected to the gas ion source;
- and
- an ion beam housing connected to the ion beam deflection unit via a bent portion, and
- the ion beam deflection unit and the ion beam housing are connected and inclined to each other via the bent portion.
Dependencies are inferred from the claim text.