C23C 14/54
Controlling or regulating the coating process
C23C14/54 (Controlling or regulating the coating process) appears on 2,183 US grants and 2,791 published applications in this corpus.
Search patents in C23C- Granted patents
- 2,183
- Published applications
- 2,791
- Assignees
- 1,099
- Inventors
- 6,096
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 5 | 0 |
| 1977 | 13 | 0 |
| 1978 | 6 | 0 |
| 1979 | 7 | 0 |
| 1980 | 9 | 0 |
| 1981 | 6 | 0 |
| 1982 | 3 | 0 |
| 1983 | 7 | 0 |
| 1984 | 11 | 0 |
| 1985 | 25 | 0 |
| 1986 | 19 | 0 |
| 1987 | 11 | 0 |
| 1988 | 5 | 0 |
| 1989 | 22 | 0 |
| 1990 | 14 | 0 |
| 1991 | 12 | 0 |
| 1992 | 24 | 0 |
| 1993 | 18 | 0 |
| 1994 | 15 | 0 |
| 1995 | 17 | 0 |
| 1996 | 22 | 0 |
| 1997 | 24 | 0 |
| 1998 | 30 | 0 |
| 1999 | 40 | 0 |
| 2000 | 48 | 0 |
| 2001 | 36 | 15 |
| 2002 | 43 | 55 |
| 2003 | 53 | 53 |
| 2004 | 41 | 59 |
| 2005 | 34 | 76 |
| 2006 | 27 | 56 |
| 2007 | 21 | 67 |
| 2008 | 34 | 66 |
| 2009 | 27 | 91 |
| 2010 | 31 | 98 |
| 2011 | 34 | 88 |
| 2012 | 55 | 118 |
| 2013 | 52 | 97 |
| 2014 | 81 | 117 |
| 2015 | 73 | 117 |
| 2016 | 87 | 132 |
| 2017 | 81 | 144 |
| 2018 | 79 | 131 |
| 2019 | 109 | 152 |
| 2020 | 111 | 166 |
| 2021 | 105 | 165 |
| 2022 | 107 | 195 |
| 2023 | 106 | 153 |
| 2024 | 137 | 161 |
| 2025 | 135 | 127 |
| 2026 | 71 | 92 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Film forming method and film forming apparatus6 Oct 2026US 12,753,485 B2Tokyo Electron Limited
- Method for controlling a flux distribution of evaporated source material, detector for measuring electromagnetic radiation reflected on a source surface and system for thermal evaporation with electromagnetic radiation6 Oct 2026US 12,753,487 B2Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V.
- External cooling assembly for substrate support6 Oct 2026US 12,755,943 B2APPLIED Materials.Inc.
- Tubular sputter cathode29 Sep 2026US 12,747,491 B2BüHler Alzenau GmbH
- Physical vapor deposition system and methods of operating the same29 Sep 2026US 12,747,492 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Productive coating process for a steel sheet and corresponding equipment8 Oct 2026US 2026/0308746 A1
- Thermally stable metallic glass films via steep compositional gradients8 Oct 2026US 2026/0308748 A1
- Deposition apparatus, thin-film deposition method using the same, and electronic apparatus manufactured using the same8 Oct 2026US 2026/0308749 A1Samsung Display Co., Ltd.
- Computer Implemented Method for Predicting a Level of Quality of a Vacuum into a Vacuum Chamber of a Coating Machine, and Corresponding Device8 Oct 2026US 2026/0308751 A1Essilor International
- Sputtering System with a Plasma Monitoring Device and an Ion Source8 Oct 2026US 2026/0311978 A1Dah Young Vacuum Equipment Co., Ltd.
Most cited
By later US patents
- Low pressure vapor phase deposition of organic thin films1,502US 6,337,102 B12002
- Heater block for heating wafer537US 6,207,932 B1Hyundai Electronics Industries Co., Ltd. · 2001
- Film forming apparatus427US 9,127,358 B2Tokyo Electron Limited · 2015
- Method and system for adjusting semiconductor processing equipment412US 6,126,744 AASM America, Inc. · 2000
- Method and apparatus for controlling sample temperature378US 4,565,601 AHitachi, Ltd. · 1986