Heater block for heating wafer
AssigneeHyundai Electronics Industries Co., Ltd.
InventorJin-Seock Yoo
Life of this patent
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Abstract
A heater block for heating a wafer comprising a body member; a wafer support disposed on the body member, the wafer support containing a plurality of troughs which extend along the surface thereof; a plurality of heated elements disposed under the wafer support in the body wherein the heat generated from each of the heated elements is transferred to the wafer support; a gas line conmected to the wafer support for supplying gas to the plurality of troughs; means for supplying heat to the heated elements; and a controller connected to the heated elements for controlling the temperature of the heated elements.
Claims9
A heater block for heating a wafer, the heater block comprising:
- a body member;
- a wafer support disposed on said body member;
- a plurality of heating elements disposed under the wafer support and in said body member,
- wherein, for a reference circle visualized from a top view of said body member and centered upon a reference point of said body member, individual ones of said heating elements are located entirely within sectors of said reference circle, and
- wherein the heat generated from each of said heating elements is transferred to said wafer support;
- a power supply to energize said heating elements;
- and
- a controller connected to said heating elements for non-uniformly controlling the energy supplied to said heating elements so as to produce angularly anisotropic heating of said heating elements.
Dependencies are inferred from the claim text.