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AssigneeHitachi, Ltd.
InventorsYutaka Kakehi, Norio Nakazato, Yoshimasa Fukushima, Kousai Hiratsuka, Fumio Shibata, Noriaki Yamamoto, Tsunehiko Tsubone
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This invention relates to a method and apparatus for controlling temperature of a sample and is intended to prevent a sample from being deformed by the pressure of a heat transmission gas by mounting and fixing the sample being mounted and processed in a vacuum on and to the sample stand and supplying the heat transmission gas to the gap between the under surface of the sample thus fixed and the sample stand; effectively control the temperature of the sample being processed in a vacuum by limiting the size of the gap between the under surface of the sample and the sample stand; and make the heat transmission gas least affect the process by limiting the flow of the heat transmission gas in the vacuum process chamber.
A method for controlling the temperature of a sample comprising electrostatically attracting a sample to be mounted on a sample stand and processed in a vacuum and supplying a heat transmission gas to the gap between the under surface of said sample thus electrostatically attracted and said stand.
A method for controlling the temperature of a sample comprising electrostatically attracting a sample to be mounted on a sample stand and processed in a vacuum to said sample stand, mechanically pressing the periphery of said sample against said sample stand and supplying a heat transmission gas to the gap between the under surface of said sample thus mechanically clamped and said sample stand.
An apparatus for controlling the temperature of a sample comprising means for electrostatically attracting a sample to be mounted on a sample stand and processed in a vacuum to said sample stand and means for supplying a heat transmission gas to the gap between the under surface of said sample thus electrostatically attracted to said sample stand by said electrostatically attracting means and said sample stand.
An apparatus for controlling the temperature of a sample comprising means for electrostatically attracting a sample to be mounted on a sample stand and to be processed in a vacuum;
Dependencies are inferred from the claim text.