C23C 14/542
Controlling the film thickness or evaporation rate
Official title: {Controlling the film thickness or evaporation rate}
C23C14/542 (Controlling the film thickness or evaporation rate) appears on 685 US grants and 941 published applications in this corpus.
Search patents in C23C- Granted patents
- 685
- Published applications
- 941
- Assignees
- 512
- Inventors
- 2,244
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 8 | 0 |
| 1978 | 3 | 0 |
| 1979 | 2 | 0 |
| 1980 | 4 | 0 |
| 1981 | 1 | 0 |
| 1982 | 3 | 0 |
| 1983 | 4 | 0 |
| 1984 | 3 | 0 |
| 1985 | 6 | 0 |
| 1986 | 8 | 0 |
| 1987 | 6 | 0 |
| 1988 | 0 | 0 |
| 1989 | 2 | 0 |
| 1990 | 6 | 0 |
| 1991 | 1 | 0 |
| 1992 | 7 | 0 |
| 1993 | 5 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 2 | 0 |
| 1997 | 6 | 0 |
| 1998 | 7 | 0 |
| 1999 | 10 | 0 |
| 2000 | 14 | 0 |
| 2001 | 6 | 5 |
| 2002 | 17 | 28 |
| 2003 | 25 | 21 |
| 2004 | 19 | 21 |
| 2005 | 13 | 28 |
| 2006 | 10 | 25 |
| 2007 | 7 | 23 |
| 2008 | 13 | 26 |
| 2009 | 7 | 32 |
| 2010 | 11 | 32 |
| 2011 | 12 | 26 |
| 2012 | 21 | 30 |
| 2013 | 7 | 27 |
| 2014 | 15 | 34 |
| 2015 | 27 | 41 |
| 2016 | 38 | 63 |
| 2017 | 22 | 52 |
| 2018 | 27 | 56 |
| 2019 | 38 | 54 |
| 2020 | 34 | 47 |
| 2021 | 37 | 53 |
| 2022 | 39 | 56 |
| 2023 | 33 | 45 |
| 2024 | 44 | 59 |
| 2025 | 34 | 36 |
| 2026 | 17 | 21 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Method for controlling a flux distribution of evaporated source material, detector for measuring electromagnetic radiation reflected on a source surface and system for thermal evaporation with electromagnetic radiation6 Oct 2026US 12,753,487 B2Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V.
- Tubular sputter cathode29 Sep 2026US 12,747,491 B2BüHler Alzenau GmbH
- Cylindric decomposition for efficient mitigation of substrate deformation with film deposition and ion implantation29 Sep 2026US 12,751,253 B2APPLIED Materials.Inc.
- Laser system and evaporation system8 Sep 2026US 12,729,424 B2Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V.
- Solar heating for thin film evaporation and directional solidification4 Aug 2026US 12,698,557 B2Blue Origin Manufacturing, LLC
- Evaporation crucible and evaporation unit24 Sep 2026US 2026/0286502 A1
- PVD Device with Adjustable Rotation Radius of Magnetron and Source Power Applied to Planar Target and Application Method Thereof17 Sep 2026US 2026/0275499 A1Arrayed Materials (China) Co., Ltd.
- Method of Providing a Multi-layer Adhesion Layer on a Workpiece17 Sep 2026US 2026/0282772 A1
- Crystal sensor and thin-film deposition device including the same10 Sep 2026US 2026/0265902 A1Samsung Display Co., Ltd.
- Improved css deposition process27 Aug 2026US 2026/0250832 A1Nanofilm Technologies International Limited
Most cited
By later US patents
- Film forming apparatus427US 9,127,358 B2Tokyo Electron Limited · 2015
- Method and system for adjusting semiconductor processing equipment412US 6,126,744 AASM America, Inc. · 2000
- Film deposition device329US 7,354,482 B2Shimadzu Corporation · 2008
- Integrated circuit device and fabrication using metal-doped chalcogenide materials199US 6,800,504 B2Micron Technology, Inc. · 2004
- Ellipsometric control of material growth168US 5,091,320 ABell Communications Research, Inc. · 1992