Evaporation crucible and evaporation unit
OwnerUlrich ENGLERT, André HERZOG +1inventors
InventorsUlrich ENGLERT, André HERZOG, Peter SAUER
Life of this patent
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Abstract
An evaporation crucible for use in an evaporation chamber to evaporate a metallic evaporation material includes an evaporation cavity having a liquid storage section and an evaporation section disposed above the liquid storage section. The evaporation cavity is bounded by a sidewall and a bottom adjoining the sidewall. An inlet in fluid communication with the evaporation cavity extends through or into the bottom and is configured to be fluidically connected to a supply to deliver molten evaporation material into the evaporation cavity. In a region of the liquid storage section, a horizontal cross-sectional area of the evaporation cavity decreases toward the inlet or bottom.
Claims20
1-15. (canceled)
An evaporation crucible for arrangement inside an evaporation chamber and for evaporating a metallic evaporation material, the evaporation crucible comprising:
- an evaporation cavity comprising a liquid storage section and an evaporation section adjoining the liquid storage section from above, wherein the evaporation cavity is confined by a sidewall and a bottom adjoining the sidewall, and
- an inlet in fluid connection with the evaporation cavity, extending through or into the bottom and fluidically connectable to a fluid connection to supply a molten evaporation material into the evaporation cavity,
- wherein in the region of the liquid storage section a horizontal cross-sectional area of the evaporation cavity reduces in size towards the inlet or bottom.
An evaporation unit for evaporating a metallic evaporation material, the evaporation unit comprising:
- an evaporation crucible arranged inside an evaporation chamber, the evaporation crucible comprising
- an evaporation cavity comprising a liquid storage section and an evaporation section adjoining the liquid storage section from above, wherein the evaporation cavity is confined by a sidewall and a bottom adjoining the sidewall, and
- an inlet in fluid connection with the evaporation cavity, extending through or into the bottom and fluidically connectable to a fluid connection to supply a molten evaporation material into the evaporation cavity,
- wherein in the region of the liquid storage section a horizontal cross-sectional area of the evaporation cavity reduces in size towards the inlet or bottom,
- a melting crucible outside the evaporation chamber and fluidically connected with the evaporation crucible, the melting crucible comprising a melting cavity to melt the metallic evaporation material, to store and/or to heat molten evaporation material, and
- a liquid level adjuster coupled with at least one of the melting crucible and the evaporation crucible and operable to vary a level of molten evaporation material inside the evaporation cavity.
A method of adjusting or controlling an evaporation rate of an evaporation unit configured to evaporate a metallic evaporation material, wherein the evaporation unit comprises an evaporation crucible arranged inside an evaporation chamber, the evaporation crucible comprising:
- an evaporation cavity comprising a liquid storage section and an evaporation section adjoining the liquid storage section from above, wherein the evaporation cavity is confined by a sidewall and a bottom adjoining the sidewall, and
- an inlet in fluid connection with the evaporation cavity, extending through or into the bottom and fluidically connectable to a fluid connection to supply a molten evaporation material into the evaporation cavity,
- wherein in the region of the liquid storage section a horizontal cross-sectional area of the evaporation cavity reduces in size towards the inlet or bottom,
- the method of adjusting or controlling the evaporation rate comprises:
- varying a fill level of molten evaporation material in the liquid storage section of the evaporation cavity.
Dependencies are inferred from the claim text.