C23C 14/00
Coating by vacuum evaporation, by sputtering or by ion implantation of the
Official title: Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C23C14/00 (Coating by vacuum evaporation, by sputtering or by ion implantation of the) appears on 21,270 US grants and 24,426 published applications in this corpus.
Search patents in C23C- Granted patents
- 21,270
- Published applications
- 24,426
- Assignees
- 5,632
- Inventors
- 40,630
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 76 | 0 |
| 1977 | 110 | 0 |
| 1978 | 87 | 0 |
| 1979 | 52 | 0 |
| 1980 | 95 | 0 |
| 1981 | 92 | 0 |
| 1982 | 71 | 0 |
| 1983 | 125 | 0 |
| 1984 | 140 | 0 |
| 1985 | 155 | 0 |
| 1986 | 125 | 0 |
| 1987 | 161 | 0 |
| 1988 | 127 | 0 |
| 1989 | 215 | 0 |
| 1990 | 234 | 0 |
| 1991 | 212 | 0 |
| 1992 | 231 | 0 |
| 1993 | 285 | 0 |
| 1994 | 267 | 0 |
| 1995 | 290 | 0 |
| 1996 | 292 | 0 |
| 1997 | 316 | 0 |
| 1998 | 396 | 0 |
| 1999 | 420 | 0 |
| 2000 | 523 | 0 |
| 2001 | 539 | 241 |
| 2002 | 548 | 579 |
| 2003 | 507 | 689 |
| 2004 | 491 | 723 |
| 2005 | 388 | 778 |
| 2006 | 288 | 797 |
| 2007 | 307 | 780 |
| 2008 | 277 | 769 |
| 2009 | 305 | 977 |
| 2010 | 483 | 1039 |
| 2011 | 525 | 1040 |
| 2012 | 576 | 1128 |
| 2013 | 674 | 1073 |
| 2014 | 740 | 1139 |
| 2015 | 765 | 1233 |
| 2016 | 809 | 1228 |
| 2017 | 907 | 1238 |
| 2018 | 840 | 1144 |
| 2019 | 898 | 1101 |
| 2020 | 894 | 1164 |
| 2021 | 795 | 1149 |
| 2022 | 762 | 1109 |
| 2023 | 771 | 974 |
| 2024 | 807 | 965 |
| 2025 | 810 | 788 |
| 2026 | 467 | 581 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- C23C 14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the14,913
- C23C 14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the10,729
- C23C 14/04Coating on selected surface areas3,071
- C23C 14/02Pretreatment of the material to be coated2,343
- C23C 14/58After-treatment2,138
- C23C 14/0021Reactive sputtering or evaporation1,870
- C23C 14/0015Characterized by the colour of the layer260
- C23C 14/0005Separation of the coating from the substrate236
All 9 subgroupsShow fewer
Recent patents
- Method of fabricating metal mask6 Oct 2026US 12,752,329 B2Darwin Precisions Corporation
- Mechanical locking sputtering target bonding method and target assemblies produced thereby6 Oct 2026US 12,752,336 B2Solstice Advanced Materials US, Inc.
- Coated cutting tool with an alternating layer composition6 Oct 2026US 12,752,344 B2Walter AG
- Wear resistant coating produced from at least two different AlCr-based targets6 Oct 2026US 12,753,484 B2Oerlikon Surface Solutions AG, PfäFfikon
- Film forming method and film forming apparatus6 Oct 2026US 12,753,485 B2Tokyo Electron Limited
- Product8 Oct 2026US 2026/0307316 A1Kuraray Co., Ltd.
- Deposition mask, method of manufacturing the same, and electronic device manufactured by using the same8 Oct 2026US 2026/0308743 A1Samsung Display Co., Ltd.
- Deposition mask, method of fabricating the same, method of manufacturing display device using the same and electronic device including the display device8 Oct 2026US 2026/0308744 A1Samsung Display Co., Ltd.
- Method for producing transparent conductive coatings for emi protection using hipims8 Oct 2026US 2026/0308745 A1Raytheon Company
- Productive coating process for a steel sheet and corresponding equipment8 Oct 2026US 2026/0308746 A1
Most cited
By later US patents
- Oxide thin film4,015US 6,294,274 B1TDK Corporation · 2001
- Low pressure vapor phase deposition of organic thin films1,502US 6,337,102 B12002
- Process and apparatus for organic vapor jet deposition1,318US 7,431,968 B1The Trustees of Princeton University · 2008
- Method for producing compound thin films1,267US 4,058,430 A1977
- Modular wafer transport and processing system655US 4,917,556 AVarian Associates, Inc. · 1990