Process and apparatus for organic vapor jet deposition
AssigneeThe Trustees of Princeton University
InventorsMax Shtein, Stephen R. Forrest
Life of this patent
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Abstract
A method of fabricating an organic film is provided. A non-reactive carrier gas is used to transport an organic vapor. The organic vapor is ejected through a nozzle block onto a cooled substrate, to form a patterned organic film. A device for carrying out the method is also provided. The device includes a source of organic vapors, a source of carrier gas and a vacuum chamber. A heated nozzle block attached to the source of organic vapors and the source of carrier gas has at least one nozzle adapted to eject carrier gas and organic vapors onto a cooled substrate disposed within the vacuum chamber.
Claims10
A method of depositing an organic film, comprising:
- a) providing a heated non-reactive carrier gas transporting organic vapor;
- b) ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block, with a bulk flow velocity at least as great as the thermal velocity of the molecules, onto a cooled substrate separated from the nozzle block by not more than about 1500 microns, to form a patterned organic film, wherein the method is used to fabricate a patterned organic film without the use of a mask, and wherein the patterned organic film has a resolution of about 1 micron or less.
A method of depositing an organic film, comprising:
- a) providing a heated non-reactive carrier gas transporting an organic vapor;
- b) ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block, with a bulk flow velocity at least as great as the thermal velocity of the molecules, onto a cooled substrate separated from the nozzle block by not more than about 1500 microns, to form a patterned organic film;
- wherein the method is used to fabricate a patterned organic film without the use of a mask;
- wherein the pattern is controlled by the separation between the nozzle block and the substrate, the size of a nozzle in the nozzle block, and the gas velocity;
- and
- wherein the distance between the substrate and the nozzle block is less than about 2.5 microns.
A method of depositing an organic film, comprising:
- a) providing a heated non-reactive carrier gas transporting an organic vapor;
- b) ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block, with a bulk flow velocity at east as great as the thermal velocity of the molecules, onto a cooled substrate separated from the nozzle block by not more than about 20 microns, to form a patterned organic film, wherein the method is used to fabricate a patterned organic film without the use of a mask.
A method of depositing an organic film, comprising:
- a) providing a heated non-reactive carrier gas transporting an organic vapor;
- b) ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block, with a bulk flow velocity at least as great as the thermal velocity of the molecules, onto a cooled substrate separated from the nozzle block by not more than about 15 microns, to form a patterned organic film.
A method of depositing an organic film, comprising:
- a) providing a heated non-reactive carrier gas transporting an organic vapor;
- b) ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block, with a bulk flow velocity at least as great as the thermal velocity of the molecules, onto a cooled substrate, to form a patterned organic film comprising a plurality of pixels, wherein the patterned organic film is a non-polymeric organic film.
A method of depositing an organic film, comprising:
- a) providing a heated non-reactive carrier gas transporting an organic vapor;
- b) ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block, with a bulk flow velocity at least as great as the thermal velocity of the molecules, onto a cooled substrate, to form a peed organic film comprising a plurality of pixels, wherein the pixels are arranged in an array.
A method of depositing an organic film, comprising:
- a) providing a heated non-reactive carrier gas transporting an organic vapor;
- b) ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block, with a bulk flow velocity at least as great as the thermal velocity of the molecules, onto a cooled substrate, to form a patterned organic film comprising a plurality of pixels, wherein the nozzle block comprises a plurality of nozzles, each nozzle to deposit an organic material that emits light of a different color.
A method of depositing an organic film, comprising:
- a) providing a heated non-reactive carrier gas transporting an organic vapor;
- b) ejecting the heated non-reactive carrier gas transporting an organic vapor through a nozzle block, with a bulk flow velocity at least as great as the thermal velocity of the molecules, onto a cooled substrate, to form a patterned organic film comprising a plurality of pixels, wherein the nozzle block comprises a plurality of nozzles, each nozzle in communication with a plurality of source cells.
Dependencies are inferred from the claim text.