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US 2026/0308743 A1Published application
Deposition mask, method of manufacturing the same, and electronic device manufactured by using the same
AssigneeSamsung Display Co., Ltd.
InventorJin Yong LEE
Life of this patent
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Abstract
A deposition mask may include a mask substrate having a cell opening, a membrane arranged on a front surface of the mask substrate, partially exposed by the cell opening, and having pixel openings penetrating (e.g., extending through) a portion exposed by the cell opening, and a rear reflective film arranged on a rear surface of the mask substrate, inner side surfaces of the cell opening, and the portion of the membrane exposed by the cell opening.
Claims20
A deposition mask comprising:
- a mask substrate having a cell opening;
- a membrane on a front surface of the mask substrate, the membrane being partially exposed by the cell opening and having pixel openings extending through a portion exposed by the cell opening;
- and
- a rear reflective film on a rear surface of the mask substrate, on inner side surfaces of the cell opening, and on the portion of the membrane exposed by the cell opening.
1 more element
A method comprising:
- forming a membrane on a front surface of a mask substrate;
- forming pixel openings extending through the membrane;
- forming a cell opening extending through the mask substrate to expose a portion of the membrane through which the pixel openings are formed;
- and
- forming a rear reflective film on a rear surface of the mask substrate, on inner side surfaces of the cell opening, and on the portion of the membrane exposed by the cell opening,
- wherein the method is a method of manufacturing a deposition mask.
3 more elements
An electronic device comprising a display panel,
- wherein the display panel comprises a backplane substrate and a plurality of light emitting layers on the backplane substrate by utilizing a deposition mask,
- wherein the deposition mask comprises:
- a mask substrate having a cell opening;
- a membrane on a front surface of the mask substrate, the membrane being partially exposed by the cell opening and having pixel openings extending through a portion exposed by the cell opening;
- and
- a rear reflective film on a rear surface of the mask substrate, on inner side surfaces of the cell opening, and on the portion of the membrane exposed by the cell opening, and
- wherein the plurality of light emitting layers are formed by a deposition process that provides a vapor deposition material onto the mask substrate through the cell opening and the pixel openings.
4 more elements
Dependencies are inferred from the claim text.