C23C 14/0021
Reactive sputtering or evaporation
Official title: {Reactive sputtering or evaporation}
C23C14/0021 (Reactive sputtering or evaporation) appears on 1,870 US grants and 2,133 published applications in this corpus.
Search patents in C23C- Granted patents
- 1,870
- Published applications
- 2,133
- Assignees
- 987
- Inventors
- 5,074
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 9 | 0 |
| 1977 | 9 | 0 |
| 1978 | 12 | 0 |
| 1979 | 3 | 0 |
| 1980 | 6 | 0 |
| 1981 | 5 | 0 |
| 1982 | 12 | 0 |
| 1983 | 14 | 0 |
| 1984 | 15 | 0 |
| 1985 | 13 | 0 |
| 1986 | 10 | 0 |
| 1987 | 19 | 0 |
| 1988 | 6 | 0 |
| 1989 | 18 | 0 |
| 1990 | 19 | 0 |
| 1991 | 9 | 0 |
| 1992 | 16 | 0 |
| 1993 | 13 | 0 |
| 1994 | 25 | 0 |
| 1995 | 31 | 0 |
| 1996 | 22 | 0 |
| 1997 | 45 | 0 |
| 1998 | 39 | 0 |
| 1999 | 32 | 0 |
| 2000 | 38 | 0 |
| 2001 | 35 | 22 |
| 2002 | 40 | 46 |
| 2003 | 43 | 51 |
| 2004 | 41 | 46 |
| 2005 | 20 | 55 |
| 2006 | 16 | 53 |
| 2007 | 20 | 60 |
| 2008 | 24 | 73 |
| 2009 | 20 | 68 |
| 2010 | 39 | 63 |
| 2011 | 41 | 81 |
| 2012 | 50 | 125 |
| 2013 | 62 | 69 |
| 2014 | 60 | 91 |
| 2015 | 49 | 99 |
| 2016 | 58 | 95 |
| 2017 | 70 | 117 |
| 2018 | 76 | 92 |
| 2019 | 74 | 105 |
| 2020 | 87 | 123 |
| 2021 | 70 | 139 |
| 2022 | 78 | 110 |
| 2023 | 98 | 114 |
| 2024 | 88 | 116 |
| 2025 | 110 | 80 |
| 2026 | 61 | 40 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Wear resistant coating produced from at least two different AlCr-based targets6 Oct 2026US 12,753,484 B2Oerlikon Surface Solutions AG, PfäFfikon
- Layered substrate with reduced blue dot defect density22 Sep 2026US 12,742,990 B2Sage Electrochromics, Inc.
- Film forming apparatus and method for manufacturing part having film containing silicon15 Sep 2026US 12,734,543 B2Tokyo Electron Limited
- Particle reduction in physical vapor deposition of amorphous silicon1 Sep 2026US 12,723,304 B2APPLIED Materials.Inc.
- Cutting tool25 Aug 2026US 12,716,123 B2Sumitomo Electric Industries, Ltd.
- Method for producing transparent conductive coatings for emi protection using hipims8 Oct 2026US 2026/0308745 A1Raytheon Company
- Coated cutting tool13 Aug 2026US 2026/0233312 A1MOLDINO Tool Engineering, Ltd.
- Heat-Treatable Coating with Blocking Layer Having Reduced Color Shift6 Aug 2026US 2026/0226603 A1Vitro Flat Glass LLC
- Max-ag electrically conductive composite coating and preparation method thereof6 Aug 2026US 2026/0226606 A1Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences
- Iron nitride magnetic material including coated nanoparticles6 Aug 2026US 2026/0229392 A1Regents of the University of Minnesota
Most cited
By later US patents
- Stationary aperture plate for reactive sputter deposition566US 5,415,753 AMaterials Research Corporation · 1995
- Forming tin thin films using remote activated specie generation418US 6,071,572 AAPPLIED Materials.Inc. · 2000
- Magnetron sputtering apparatus and process326US 4,851,095 AOptical Coating Laboratory, Inc. · 1989
- Endocurietherapy293US 5,342,283 A1994
- Heat treatable low-E coated articles and methods of making same275US 6,576,349 B2Centre Luxembourgeois de Recherches pour le Verra et la Ceramique S.A.(C.R.V.C.) · 2003