C23C 14/0026
Activation or excitation of reactive gases outside the coating chamber
Official title: {Activation or excitation of reactive gases outside the coating chamber}
C23C14/0026 (Activation or excitation of reactive gases outside the coating chamber) appears on 107 US grants and 115 published applications in this corpus.
Search patents in C23C- Granted patents
- 107
- Published applications
- 115
- Assignees
- 83
- Inventors
- 276
- Latest grant
- 5 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 3 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 3 | 0 |
| 1999 | 7 | 0 |
| 2000 | 5 | 0 |
| 2001 | 1 | 3 |
| 2002 | 4 | 8 |
| 2003 | 4 | 3 |
| 2004 | 2 | 3 |
| 2005 | 2 | 1 |
| 2006 | 5 | 8 |
| 2007 | 2 | 6 |
| 2008 | 4 | 1 |
| 2009 | 0 | 5 |
| 2010 | 5 | 3 |
| 2011 | 4 | 8 |
| 2012 | 1 | 4 |
| 2013 | 4 | 7 |
| 2014 | 4 | 3 |
| 2015 | 4 | 5 |
| 2016 | 1 | 3 |
| 2017 | 5 | 11 |
| 2018 | 5 | 5 |
| 2019 | 4 | 0 |
| 2020 | 4 | 4 |
| 2021 | 3 | 5 |
| 2022 | 4 | 7 |
| 2023 | 3 | 4 |
| 2024 | 5 | 4 |
| 2025 | 3 | 4 |
| 2026 | 2 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Anti-reflective coatings for IR-transmitting substrates5 May 2026US 12,618,138 B2Corning Incorporated
- Systems and methods for vaporization and vapor distribution13 Jan 2026US 12,522,911 B2First Solar, Inc.
- Ion implantation to modify glass locally for optical devices5 Aug 2025US 12,378,662 B2APPLIED Materials.Inc.
- Item comprising an organic-inorganic layer with a low refractive index20 May 2025US 12,305,271 B2Corporation De L'ecole Polytechnique De Montreal
- Methods and material deposition systems for forming semiconductor layers11 Mar 2025US 12,249,506 B2Silanna UV Technologies Pte Ltd
- Member and method for producing same18 Sep 2025US 2025/0290191 A1AGC Inc.
- Yttrium-based protective film, method for producing same, and member28 Aug 2025US 2025/0270685 A1AGC Inc.
- Methods and material deposition systems for forming semiconductor layers5 Jun 2025US 2025/0183033 A1Silanna UV Technologies Pte Ltd
- Set comprising a physical vapor deposition machine and an obstruction device, method for coating and obstruction device15 May 2025US 2025/0154641 A1Essilor International
- Yttrium-based protective film, method for producing same, and member26 Dec 2024US 2024/0425979 A1AGC Inc.
Most cited
By later US patents
- Methods for forming dielectric materials and methods for forming semiconductor devices189US 6,534,420 B2Micron Technology, Inc. · 2003
- Device enclosures and devices with integrated battery119US 6,986,965 B2Cymbet Corporation · 2006
- Method for optimizing photoresponsive amorphous alloys and devices114US 4,522,663 ASovonics Solar Systems · 1985
- Method and apparatus for integrated-battery devices112US 6,805,998 B2Cymbet Corporation · 2004
- Process for preparing ferroelectric thin films111US 6,387,712 B1TDK Corporation · 2002