C23C 14/0031
Bombardment of substrates by reactive ion beams
Official title: {Bombardment of substrates by reactive ion beams}
C23C14/0031 (Bombardment of substrates by reactive ion beams) appears on 65 US grants and 79 published applications in this corpus.
Search patents in C23C- Granted patents
- 65
- Published applications
- 79
- Assignees
- 50
- Inventors
- 161
- Latest grant
- 5 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 2 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 3 |
| 2002 | 3 | 7 |
| 2003 | 4 | 2 |
| 2004 | 2 | 3 |
| 2005 | 2 | 1 |
| 2006 | 3 | 6 |
| 2007 | 2 | 2 |
| 2008 | 2 | 0 |
| 2009 | 0 | 4 |
| 2010 | 2 | 1 |
| 2011 | 3 | 5 |
| 2012 | 1 | 4 |
| 2013 | 2 | 3 |
| 2014 | 3 | 2 |
| 2015 | 4 | 5 |
| 2016 | 1 | 0 |
| 2017 | 4 | 11 |
| 2018 | 4 | 4 |
| 2019 | 1 | 0 |
| 2020 | 4 | 2 |
| 2021 | 2 | 3 |
| 2022 | 2 | 4 |
| 2023 | 2 | 3 |
| 2024 | 3 | 1 |
| 2025 | 2 | 3 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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