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US 7,194,801 B2Granted
Thin-film battery having ultra-thin electrolyte and associated method
AssigneeCymbet Corporation
InventorsMark Lynn Jenson, Victor Henry Weiss
Life of this patent
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Abstract
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.
Claims103
A method of fabricating a thin-film battery, comprising:
- providing a substrate;
- forming an electrode first film on the substrate;
- forming an electrolyte second film electrolyte on the first film, wherein the electrolyte second film blocks the flow of electrons while permitting the flow of ions, and wherein forming the electrolyte second film includes:
- depositing electrolyte material using a deposition source;
- and
- supplying energized particles from a second source such that the particles provide energy to the electrolyte material to deposit the electrolyte material into a desired film structure;
- and
- forming an electrode third film on the second film,
- wherein the forming the electrolyte second film includes forming the electrolyte film to a thickness of less than 1000 Angstroms.
6 more elements
An apparatus comprising:
- means for providing a substrate;
- means for forming an electrode first film on the substrate;
- means for forming an electrolyte second film on the first film, wherein the electrolyte second film blocks the flow of electrons while permitting the flow of ions, and wherein the means for forming the electrolyte second film includes:
- means for depositing electrolyte material using a deposition source;
- and
- means for supplying energized particles from a second source such that the particles provide energy to the electrolyte material to deposit the electrolyte material into a desired film structure;
- and
- means for forming an electrode third film on the second film, wherein the electrolyte second film is deposited to a thickness of less than about 1000 Angstroms.
5 more elements
A method of fabricating a thin-film battery, comprising:
- providing a substrate;
- forming an electrode first film on the substrate;
- forming an electrolyte second film electrolyte on the first film, wherein the electrolyte second film blocks the flow of electrons while permitting the flow of ions, and wherein forming the electrolyte second film includes:
- depositing electrolyte material using a deposition source;
- and
- supplying energized particles from a second source such that the particles provide energy to the electrolyte material to deposit the electrolyte material into a desired film structure;
- and
- forming an electrode third film on the second film,
- wherein the supplying energized particles includes supplying ions having an energy in the range of about 5 eV to about 50 eV, and
- wherein the forming the electrolyte second film includes forming the electrolyte film to a thickness of less than 1000 Angstroms.
7 more elements
A method of fabricating a thin-film battery, comprising:
- providing a substrate;
- forming an electrode first film on the substrate;
- forming an electrolyte second film electrolyte on the first film, wherein the electrolyte second film blocks the flow of electrons while permitting the flow of ions, and wherein forming the electrolyte second film includes:
- depositing electrolyte material using a deposition source;
- and
- supplying energized particles from a second source such that the particles provide energy to the electrolyte material to deposit the electrolyte material into a desired film structure;
- and
- forming an electrode third film on the second film,
- wherein the forming the electrolyte second film includes forming the electrolyte film to a thickness of less than about 200 Angstroms.
6 more elements
A method of fabricating a thin-film battery, comprising:
- providing a substrate;
- forming an electrode first film on the substrate;
- forming an electrolyte second film electrolyte on the first film, wherein the electrolyte second film blocks the flow of electrons while permitting the flow of ions, and wherein forming the electrolyte second film includes:
- depositing electrolyte material using a deposition source;
- and
- supplying energized particles from a second source such that the particles provide energy to the electrolyte material to deposit the electrolyte material into a desired film structure;
- and
- forming an electrode third film on the second film,
- wherein the forming of the first film includes depositing a vanadium oxide, the forming of the second film includes depositing lithium phosphorus oxynitride, and the forming of the third film includes depositing a lithium intercalation material, and
- wherein the forming the electrolyte second film includes forming the electrolyte film to a thickness of less than 1000 Angstroms.
7 more elements
A method comprising:
- providing a substrate;
- depositing an electrolyte second film on the first film, wherein the electrolyte second film blocks, the flow of electrons while permitting the flow of ions, and wherein the electrolyte second film includes LIPON electrolyte material deposited using an electrolyte deposition source and energized nitrogen particles from a second source such that the energized nitrogen particles provide energy to the electrolyte material during its deposition to form the electrolyte material into a desired film structure;
- and
- depositing an electrode third film on the second film,
- wherein the electrolyte second film is deposited to a thickness in a range of about 10 Angstroms and about 200 Angstroms.
2 more elements
An apparatus comprising:
- means for providing a substrate;
- means for depositing an electrode first film on the substrate;
- means for depositing an electrolyte second film on the first film, wherein the electrolyte second film blocks the flow of electrons while permitting the flow of ions, and wherein the electrolyte second film includes LIPON electrolyte material deposited using an electrolyte deposition source and energized nitrogen particles from a second source such that the energized nitrogen particles provide energy to the electrolyte material during its deposition to form the electrolyte material into a desired film structure;
- and
- means for depositing an electrode third film to form a battery that includes the electrolyte second film and the electrode first film,
- wherein the electrolyte second film is deposited to a thickness of less than about 1000 Angstroms.
3 more elements
Dependencies are inferred from the claim text.