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US 2026/0308748 A1Published application
Thermally stable metallic glass films via steep compositional gradients
OwnerJagannathan Rajagopalan, Rohit Berliainventors
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Abstract
A method to grow metallic glass films utilizes engineering steep, spatially modulated compositional gradients during physical vapor deposition. This method can be used to enhance the thermal stability (increase glass transition and crystallization temperature) of thin film metallic glasses or can be used to produce amorphous films of metallic alloys that do not readily form a glassy structure.
Claims14
A method of forming a metallic glass film, the method comprising:
- providing, to a sputtering system, a first target comprising a first material, a second target comprising a second material, and a third target comprising a third material;
- simultaneously depositing, on a substrate, the first material with a first applied power, the second material with a second applied power, and the third material with a third applied power, wherein the first applied power is applied to the first target, the second applied power is applied to the second target, and the third applied power is applied to the third target;
- and
- adjusting the first applied power, the second applied power, and the third applied power,
- wherein the metallic glass film comprises a ternary alloy, and
- wherein the first material is aluminum (Al), the second material is nickel (Ni), and the third material is yttrium (Y).
3 more elements
Dependencies are inferred from the claim text.