B81C 2203/0707
Monolithic integration, i.e. the electronic processing unit is formed on or in
Official title: Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure
B81C2203/0707 (Monolithic integration, i.e. the electronic processing unit is formed on or in) appears on 622 US grants and 642 published applications in this corpus.
Search patents in B81C- Granted patents
- 622
- Published applications
- 642
- Assignees
- 237
- Inventors
- 1,021
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 2 | 0 |
| 1995 | 2 | 0 |
| 1996 | 4 | 0 |
| 1997 | 6 | 0 |
| 1998 | 14 | 0 |
| 1999 | 5 | 0 |
| 2000 | 12 | 0 |
| 2001 | 8 | 2 |
| 2002 | 10 | 5 |
| 2003 | 12 | 10 |
| 2004 | 13 | 20 |
| 2005 | 9 | 9 |
| 2006 | 6 | 15 |
| 2007 | 14 | 15 |
| 2008 | 7 | 20 |
| 2009 | 7 | 30 |
| 2010 | 25 | 30 |
| 2011 | 25 | 54 |
| 2012 | 41 | 25 |
| 2013 | 37 | 35 |
| 2014 | 32 | 43 |
| 2015 | 38 | 49 |
| 2016 | 56 | 49 |
| 2017 | 37 | 42 |
| 2018 | 36 | 41 |
| 2019 | 34 | 28 |
| 2020 | 35 | 29 |
| 2021 | 23 | 19 |
| 2022 | 16 | 15 |
| 2023 | 19 | 16 |
| 2024 | 10 | 18 |
| 2025 | 15 | 16 |
| 2026 | 9 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81C 2203/0735Post-cmos, i.e. forming the micromechanical structure after the cmos circuitIndexing code293
- B81C 2203/0757Topology for facilitating the monolithic integrationIndexing code190
- B81C 2203/0714Forming the micromechanical structure with a cmos processIndexing code163
- B81C 2203/0742Interleave, i.e. simultaneously forming the micromechanical structure and the cmos circuitIndexing code96
- B81C 2203/0728Pre-cmos, i.e. forming the micromechanical structure before the cmos circuitIndexing code55
- B81C 2203/075The electronic processing unit being integrated into an element of the micromechanicalIndexing code35
- B81C 2203/0721Forming the micromechanical structure with a low-temperature processIndexing code14
Recent patents
- MEMS pressure sensor built using the beol metal layers of a solid-state semiconductor process11 Aug 2026US 12,703,621 B2Nanusens SL
- Decoupling method for semiconductor device23 Jun 2026US 12,662,371 B2STMicroelectronics International N. V.
- Stacked die package and methods of forming the same23 Jun 2026US 12,667,009 B2Qorvo US, Inc.
- Foundry-compatible process for integrated micro-speaker and microphone26 May 2026US 12,641,387 B2Vibrant Microsystems Inc.
- CMOS ultrasonic transducers and related apparatus and methods10 Mar 2026US 12,569,880 B2Bfly Operations, Inc.
- Foundry-compatible process for integrated micro-speaker and microphone17 Sep 2026US 2026/0281642 A1Vibrant Microsystems Inc.
- Stacked die package and methods of forming the same17 Sep 2026US 2026/0283037 A1Qorvo US, Inc.
- Mems device built using the beol metal layers of a solid state semiconductor process16 Jul 2026US 2026/0200722 A1Nanusens SL
- Cmos ultrasonic transducers and related apparatus and methods9 Jul 2026US 2026/0192332 A1Bfly Operations, Inc.
- Micro-electro mechanical system and manufacturing method thereof4 Jun 2026US 2026/0152385 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Vertical system integration289US 7,402,897 B2Elm Technology Corporation · 2008
- Lithography device for semiconductor circuit pattern generator287US 7,242,012 B2Elm Technology Corporation · 2007
- Polycrystalline silicon germanium films for forming micro-electromechanical systems226US 6,210,988 B1The Regents of the University of California · 2001
- Method for integrating microelectromechanical devices with electronic circuitry200US 5,963,788 ASandia Corporation · 1999
- Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters171US 5,798,042 AThe Regents of the University of California · 1998