B81C 2203/0728
Pre-cmos, i.e. forming the micromechanical structure before the cmos circuit
Official title: Pre-CMOS, i.e. forming the micromechanical structure before the CMOS circuit
B81C2203/0728 (Pre-cmos, i.e. forming the micromechanical structure before the cmos circuit) appears on 55 US grants and 45 published applications in this corpus.
Search patents in B81C- Granted patents
- 55
- Published applications
- 45
- Assignees
- 39
- Inventors
- 107
- Latest grant
- 26 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 2 | 0 |
| 1997 | 2 | 0 |
| 1998 | 5 | 0 |
| 1999 | 3 | 0 |
| 2000 | 3 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 0 |
| 2004 | 0 | 1 |
| 2005 | 0 | 1 |
| 2006 | 0 | 4 |
| 2007 | 1 | 4 |
| 2008 | 0 | 1 |
| 2009 | 2 | 6 |
| 2010 | 5 | 6 |
| 2011 | 4 | 2 |
| 2012 | 7 | 0 |
| 2013 | 1 | 1 |
| 2014 | 1 | 1 |
| 2015 | 1 | 2 |
| 2016 | 2 | 2 |
| 2017 | 0 | 1 |
| 2018 | 2 | 3 |
| 2019 | 2 | 2 |
| 2020 | 2 | 1 |
| 2021 | 1 | 1 |
| 2022 | 1 | 1 |
| 2023 | 1 | 0 |
| 2024 | 1 | 2 |
| 2025 | 1 | 2 |
| 2026 | 3 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Foundry-compatible process for integrated micro-speaker and microphone26 May 2026US 12,641,387 B2Vibrant Microsystems Inc.
- Microfluidic channels in a substrate with a surface covered by a layer stack13 Jan 2026US 12,521,714 B2GLOBALFOUNDRIES U. S. Inc.
- Foundry-compatible through silicon via process for integrated micro-speaker and microphone6 Jan 2026US 12,515,943 B2Vibrant Microsystems Inc.
- Electronic device and method of fabricating the same28 Oct 2025US 12,454,454 B2Beijing Boe Optoelectronics Technology Co., Ltd.
- Integrated digital force sensors and related methods of manufacture2 Apr 2024US 11,946,817 B2DecaWave, Ltd.
- Foundry-compatible process for integrated micro-speaker and microphone17 Sep 2026US 2026/0281642 A1Vibrant Microsystems Inc.
- Foundry-compatible through silicon via process for integrated micro-speaker and microphone20 Feb 2025US 2025/0059023 A1Vibrant Microsystems Inc.
- Foundry-compatible process for integrated micro-speaker and microphone23 Jan 2025US 2025/0030998 A1Vibrant Microsystems Inc.
- Electronic device and method of fabricating the same15 Aug 2024US 2024/0270566 A1Beijing Boe Optoelectronics Technology Co., Ltd.
- Microfluidic channels in a substrate with a surface covered by a layer stack11 Jan 2024US 2024/0009668 A1GLOBALFOUNDRIES U. S. Inc.
Most cited
By later US patents
- Method for integrating microelectromechanical devices with electronic circuitry200US 5,963,788 ASandia Corporation · 1999
- Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters171US 5,798,042 AThe Regents of the University of California · 1998
- Capacitance pressure sensor161US 6,012,336 ASandia Corporation · 2000
- Method for fabrication of high vertical aspect ratio thin film structures128US 5,660,680 AThe Regents of the University of California · 1997
- Method for integrating microelectromechanical devices with electronic circuitry122US 5,798,283 ASandia Corporation · 1998