B81C 1/00396
Mask characterised by its composition
Official title: {Mask characterised by its composition, e.g. multilayer masks}
B81C1/00396 (Mask characterised by its composition) appears on 77 US grants and 83 published applications in this corpus.
Search patents in B81C- Granted patents
- 77
- Published applications
- 83
- Assignees
- 71
- Inventors
- 225
- Latest grant
- 26 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 1 |
| 2002 | 1 | 6 |
| 2003 | 6 | 3 |
| 2004 | 7 | 0 |
| 2005 | 1 | 5 |
| 2006 | 1 | 0 |
| 2007 | 1 | 2 |
| 2008 | 2 | 3 |
| 2009 | 0 | 0 |
| 2010 | 1 | 3 |
| 2011 | 2 | 2 |
| 2012 | 1 | 3 |
| 2013 | 3 | 4 |
| 2014 | 4 | 2 |
| 2015 | 5 | 11 |
| 2016 | 12 | 6 |
| 2017 | 7 | 7 |
| 2018 | 3 | 1 |
| 2019 | 5 | 3 |
| 2020 | 3 | 4 |
| 2021 | 1 | 2 |
| 2022 | 1 | 1 |
| 2023 | 2 | 5 |
| 2024 | 2 | 2 |
| 2025 | 3 | 7 |
| 2026 | 2 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method of producing an etching mask, method of etching a structure into a substrate, use of a tetrel layer and structure for producing a mask26 May 2026US 12,642,059 B2JENOPTIK Optical Systems GmbH
- MEMS speaker and method of microfabrication of such a speaker20 Jan 2026US 12,528,104 B2Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Method and system for fabricating a MEMS device cap11 Nov 2025US 12,466,726 B2InvenSense, Inc.
- Method and system for fabricating a MEMS device25 Mar 2025US 12,258,266 B2InvenSense, Inc.
- Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers18 Mar 2025US 12,252,396 B2Texas Instruments Incorporated
- Method and system for fabricating a mems device cap11 Dec 2025US 2025/0376371 A1InvenSense, Inc.
- Optical signal redirection structure for photonics device31 Jul 2025US 2025/0244543 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Micro-electromechanical system (mems) mirror comb drive12 Jun 2025US 2025/0187905 A1Lumentum Operations LLC
- Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers5 Jun 2025US 2025/0178890 A1
- Method and system for fabricating a mems device8 May 2025US 2025/0145456 A1InvenSense, Inc.
Most cited
By later US patents
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004
- Method of nanoscale patterning and products made thereby250US 5,948,470 A1999
- Micromechanical device and methods to fabricate same using hard mask resistant to structure release etch140US 8,440,523 B1International Business Machines Corporation · 2013
- Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation87US 6,518,194 B22003
- Method for fabricating a structure for a microelectromechanical system (MEMS) device59US 7,250,315 B2Idc, LLC · 2007