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US 2025/0178890 A1Published application
Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers
OwnerChristopher Murray BEARD, Song ZHENG +4inventors
InventorsChristopher Murray BEARD, Song ZHENG, John Wesley HAMLIN, III, Win-Jae Jessie YUAN, Kelly Jay TAYLOR, Jose Antonio MARTINEZ SOTO
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Abstract
In an example, a MEMS device includes an anti-reflective coating layer formed on a substrate of the MEMS device. The device includes a hinge formed on the substrate, where an edge of the hinge on the substrate is aligned with an edge of the anti-reflective coating layer. The device includes a mirror coupled to the hinge.
Claims18
A microelectromechanical system (MEMS) device, comprising:
- a substrate;
- an anti-reflective coating layer on the substrate;
- a hinge on the substrate, wherein an edge of the hinge on the substrate is aligned with an edge of the anti-reflective coating layer;
- and
- a mirror coupled to the hinge.
2 more elements
A device comprising:
- a metal layer;
- an anti-reflective coating on the metal layer, the anti-reflective coating having an edge;
- and
- a via on the metal layer, the via having a surface, wherein the edge the anti-reflective coating is adjacent the surface of the via.
1 more element
A microelectromechanical systems (MEMS) device comprising:
- a metal layer;
- an anti-reflective coating on the metal layer having edges;
- a hinge layer on the metal layer, the hinge layer having a via having sidewalls having surfaces, wherein surfaces of the sidewalls of the via are aligned with the edges of the anti-reflective coating;
- and
- a mirror over the hinge layer.
2 more elements
Dependencies are inferred from the claim text.