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US 6,518,194 B2Granted
Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation
OwnerThomas Andrew Winningham, Kenneth Douglasinventors
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Abstract
A method for using intermediate transfer layers for transferring nanoscale patterns to substrates and forming nanostructures on substrates. An intermediate transfer layer is applied to a substrate surface, and one or more mask templates are then applied to the intermediate transfer layer. Holes are etched through the intermediate transfer layer, and material may be deposited into the etched holes.
Claims22
A method for producing an ordered array of nanostructures on a substrate surface, comprising the steps of:
- providing a substrate having a surface;
- forming an intermediate transfer layer on said substrate surface;
- mounting a mask template on said intermediate transfer layer, wherein said mask template includes an ordered array of nanoscale pores therein;
- and
- etching a pattern through said intermediate transfer layer, wherein said pattern substantially replicates the size and spacing of the ordered array of nanoscale holes in said mask template.
2 more elements
A method for producing an ordered array of nanostructures on a substrate surface, comprising the steps of:
- providing a substrate having a surface;
- forming an intermediate transfer layer on said substrate;
- mounting a mask template on said intermediate transfer layer, wherein said mask template includes an ordered array of nanoscale pores therein;
- transferring a first pattern comprising a first ordered array of nanostructures to said intermediate transfer layer, wherein said first ordered array of nanostructures corresponds to said nanoscale pores in said mask template;
- and
- transferring a second pattern comprising a second ordered array of nanostructures to said substrate, wherein said nanostructures in said second array correspond to said first ordered array of nanostructures of said intermediate transfer layer.
3 more elements
Dependencies are inferred from the claim text.