Micro-electromechanical system (mems) mirror comb drive

A method for manufacturing a micro-electromechanical system (MEMS) device, comprising:

• disposing, by a manufacturing device, an electrode layer on a first wafer layer;
• disposing, by the manufacturing device, a mirror layer on a second wafer layer;
• bonding, by the manufacturing device, the mirror layer and the electrode layer;
• etching, by the manufacturing device, the mirror layer to form an offset between a first surface of the mirror layer and a second surface of the mirror layer;
• and
• etching, by the manufacturing device, the mirror layer to form a set of rotors and a set of stators,
• wherein the set of rotors include at least a portion of the first surface of the mirror layer and the set of stators include at least a portion of the second surface of the mirror layer.

A phase-shifting optical device, comprising:

• a micro-electromechanical system (MEMS) device, comprising:
• a substrate;
• an electrode layer disposed on the substrate;
• a mirror layer disposed on the electrode layer,
• wherein the mirror layer is configured to cause a phase shift of an optical beam;
• a set of stator teeth formed from at least a first portion of the mirror layer and at least a portion of the electrode layer;
• and
• a set of rotor teeth formed from at least a second portion of the mirror layer and disposed on a hinge and engaged with the set of stator teeth.