MEMS speaker and method of microfabrication of such a speaker
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorRomain Liechti
Life of this patent
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Abstract
A MEMS speaker suitable for generating audible sound waves, includes a bimetallic strip actuation system extending in a first plane and an amplification capsule including a membrane extending in a second plane, parallel to the first plane, the membrane including a rigid interior zone and a flexible exterior zone, and a rigid coupling wall, fastened at the periphery of the bimetallic strip actuation system to make the exterior zone of the membrane integral with said actuation system.
Claims9
A MEMS speaker adapted to generate audible sound waves, comprising a bimetallic strip actuation system extending in a first plane, and an amplification capsule comprising:
- a membrane extending in a second plane, parallel to the first plane, said membrane comprising a rigid interior zone and a flexible exterior zone, and
- a rigid coupling wall, fastened at a periphery of the bimetallic strip actuation system to make the flexible exterior zone of the membrane integral with said actuation system and, under the effect of an actuation voltage, generate a bending moment resulting in a translation of the rigid interior zone of said membrane.
Dependencies are inferred from the claim text.