H10W 20/035
Combinations of barrier, adhesion or liner layers
Official title: {combinations of barrier, adhesion or liner layers, e.g. multi-layered barrier layers}
H10W20/035 (Combinations of barrier, adhesion or liner layers) appears on 2,029 US grants and 2,335 published applications in this corpus.
Search patents in H10W- Granted patents
- 2,029
- Published applications
- 2,335
- Assignees
- 261
- Inventors
- 3,111
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 3 | 0 |
| 1995 | 2 | 0 |
| 1996 | 5 | 0 |
| 1997 | 6 | 0 |
| 1998 | 7 | 0 |
| 1999 | 14 | 0 |
| 2000 | 42 | 0 |
| 2001 | 54 | 23 |
| 2002 | 64 | 77 |
| 2003 | 75 | 73 |
| 2004 | 61 | 67 |
| 2005 | 60 | 105 |
| 2006 | 47 | 119 |
| 2007 | 64 | 121 |
| 2008 | 57 | 111 |
| 2009 | 66 | 94 |
| 2010 | 109 | 102 |
| 2011 | 91 | 66 |
| 2012 | 66 | 62 |
| 2013 | 58 | 52 |
| 2014 | 76 | 75 |
| 2015 | 58 | 83 |
| 2016 | 82 | 73 |
| 2017 | 95 | 102 |
| 2018 | 96 | 112 |
| 2019 | 102 | 125 |
| 2020 | 104 | 101 |
| 2021 | 93 | 102 |
| 2022 | 70 | 126 |
| 2023 | 82 | 120 |
| 2024 | 81 | 106 |
| 2025 | 85 | 94 |
| 2026 | 52 | 44 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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Most cited
By later US patents
- Atomic layer deposition with nitrate containing precursors1,176US 6,203,613 B1International Business Machines Corporation · 2001
- Method of forming metal layer using atomic layer deposition and semiconductor device having the metal layer as barrier metal layer or upper or lower electrode of capacitor1,063US 6,287,965 B1Samsung Electronics Co., Ltd. · 2001
- Method of forming graded thin films using alternating pulses of vapor phase reactants1,034US 6,534,395 B2ASM Microchemistry Oy · 2003
- Method for forming metal layer using atomic layer deposition892US 6,174,809 B1Samsung Electronics Co., Ltd. · 2001
- Plated copper interconnect structure621US 5,969,422 AAdvanced Micro Devices, Inc. · 1999